2

1500 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 183 Regulator Series AR10-A to AR40-A Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Locking style (Slotted) Except for VQZ 1000 0.6 0.7 (A) 4 1 (P) 5 (R) Except for VQZ 1000 N.O.

For post-stoppage positioning and locking

.) * Values for W-R1 Series Integration of the clamping unit and cylinder unit reduces design and assembly labor Cylinder Approx. 70 Clamp assembly 436 mm Selectable proximity switch for checking arm operation (Option) 250 mm Selectable when the mass of the transferred object is either 1000 kg or 3000 kg, with consideration given to the impact during positioning 15-E655 W-R1/W-R3 Series

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS32 LEKFS40 1000 1000 1000 800 800 800 L1 L1 [mm] L1 [mm] L1 [mm] 600 600 600 X 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 0 10 20 30 40 50 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 0 10 20

V100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Series: LEKFS, Size: 40, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 1000, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Indicator light 3.5 to 7 < >: AC 82.5 75 M plug connector (M): VQZ25(R)-M01 02 56.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 77.5 58 <63> 300 89 Indicator light < >: AC 4-14-31 Base Mounted 32 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ35(R)-G02 03 37 5 2-4.5 mounting hole 23.5 5 R5 Cover dia. 1.6 Manual override Cross section 0.34 mm2 2 A 45

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 1000, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 1000, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 1000, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C9F (EtherNet/IPâ„¢ with STO Sub-Function), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 1000, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 1,000, Max. Transportable Mass Range (Horizontal)(kg): 5.1 to 10.0, Max. Transportable Mass (Horizontal)(kg): 10, Drive Method: Belts, Guide: Included, Lead(mm): 48, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: Not Provided, Table Width W1(mm): 50, Brake: Not Provided, Noise Filters: Not Provided

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m

Series: LEFB (Belt Drive), Size: 25, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 1000mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)

Series: LEFB (Belt Drive), Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 1000mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)