Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H), I/O Connector: H (Connector)

Accuracy: High Precision Type, Size: 63, Motor Type: 200W Output, Absolute Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSS2-T, 200~240V Absolute, SSCNETIII/H, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 63, Motor Type: 200W Output, Absolute Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSS2-T, 200~240V Absolute, SSCNETIII/H, I/O Connector: Connector, Option: -

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

Table of Contents

R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type

1

) 1(P) 5(R1) 3(R2) N.C.

2

500 110 Auto-drains listed on page 95 are attached.

VFS

VVFS2000-22A-1 VVFS2000-22A-2 Cylinder pressure Check valve G E T D Applicable valve model VFS2400-F VFS2410R1 Solenoid one side energized 210 or less P R2 Piston SUP side pressure (P1) Leakage (cm2/min) R1 210 or less P Solenoid both sides de-energized SUP side pressure P1 (MPa) R2 0 A R1 Operating range B R2 Supply pressure: 0.5 MPa Double check spacer Caution In the case of 3 position

VQ7-6/7-8

R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type

SYJ3000/5000/7000

R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(B) 2 (B) 2 (A) 4 (A) 4 Number of solenoids Plug Plug Single Double Locked position 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) LOCK PUSH (B) 2 (A) 4 (A) 4 (B) 2 Plug Plug 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (JIS Symbols above: Series 10-SYJ5000) Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Flow Control Equipment Pressure Switches/ Pressure Sensors 3(R2) 1 (P) (R1)5 3 position pressure center i 2(B) (A)4 5 (R1) 1 (P) 3 (R2) 3(R2) 1 (P) (R1)5 (This figure shows a closed center type.)

VQZ1000/2000/3000

) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

15

1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500

VQ7-6/7-8

71) 56 (71) 16 (20) (port A) 16 (20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override Manual override A B PB B A PB B 62 (72) 75 (86) 62 (72) 75 (86) 50 38 50 38 A B A Prewired connector (M12) (L approx. 500) Prewired connector (M12) (L approx. 500) PA R2 P R1 PA R2 R1 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole Indicator light 49 (64) 49 (64) 108.5 (

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.