VQZ1000/2000/3000

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQZ2121-C6 800 700 600 500 400 300 200 100 0 VQZ3121-C6 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being

2

H 800 I 355 J Model Inlet and outlet port IDF190D IDF240D JIS 10K FF 80 (3B) flange 427 JIS 10K FF 100 (4B) flange 592 770 1550 1640 385 703 730 700 800 355 The auto drain is enclosed in the same shipping package as the main body.

V100

VG External Pilot Port VP Series Port size SYJ500/700 M5 x 0.8 S070 JIS Symbol VQ Body ported N.C. N.O. VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

Shock Absorbers and Rate Controls

5 20.0 700 17.0 or. PII| 25tf -2, -3 .63 1.00 1,400 7/4,000 ,500 12.5 20.0 700 21.0 or. Prit220tf -1, -2, -3 .63 2.00 2.750 800,000 2,500 7.0 20.0 700 23.0 oz. PII225tI l, -2, -3 .63 2.00 2,t50 900,000 2,500 t.0 20.0 700 27 .0 oz. P r525rf -t, -2, -3 0./5 1.00 2,000 1,120,000 4,000 I1.0 15.0 2.1 1b5.

Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 700mm

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 700, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CP1 (JXCP1, PROFINET, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 700, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: CP1 (JXCP1, PROFINET, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Series: LEKFS, Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 700, Motor Option: B (with Lock), Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 700mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: -, I/O Connector: -

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 700mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: -, I/O Connector: -

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable

Size: 40, Motor Type: T6 [AC Servo Motor (Absolute Encoder) 100W], Stroke: 700mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: 5m

Size: 40, Motor Type: T6 [AC Servo Motor (Absolute Encoder) 100W], Stroke: 700mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: -, I/O Connector: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1000mm

Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1200mm