Size: 6, Motor Size: Standard, Lead Screw Type, mm: K (LEPS6: 4; LEPS10: 5), Stroke: 50mm, Motor Cable Mounting Direction: L (Entry on Left Side)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5

CQS

x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M3 x 35l x 40l x 45l x 50l x 55l x 60l M3 x 35l x 40l x 45l x 50l x 55l x 60l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l 6.5 6.5 Head side

Size: 6, Motor Size: Standard, Lead Screw Type, mm: LEPS6: 4; LEPS10: 5, Stroke: 50mm, Motor Cable Mounting Direction: Entry on Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length, m: 5, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length, m: 3, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting, DIN Rail not Included

Size: 6, Motor Size: Standard, Lead Screw Type, mm: K (LEPS6: 4; LEPS10: 5), Stroke: 50mm, Motor Cable Mounting Direction: L (Entry on Left Side), Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 1 (1.5), Controller Type - LEC, JXC: C51 (JXC51, Parallel NPN, Step Data Input Type), I/O Cable Length for LEC: No Cable, Controller Mounting: 8 (DIN Rail Mounting), Communication

Size: 6, Motor Size: Standard, Lead Screw Type, mm: LEPS6: 4; LEPS10: 5, Stroke: 50mm, Motor Cable Mounting Direction: Entry on Left Side, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 3, Controller Type - LEC, JXC: LECP1, Programless Type, PNP, I/O Cable Length for LEC: 3, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC

Size: 6, Motor Size: Standard, Lead Screw Type, mm: LEPS6: 4; LEPS10: 5, Stroke: 50mm, Motor Cable Mounting Direction: Entry on Left Side, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 15, Controller Type - LEC, JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: No Cable, Controller Mounting: DIN Rail Mounting, Communication Plug Connector

Size: 6, Motor Size: Standard, Lead Screw Type, mm: LEPS6: 4; LEPS10: 5, Stroke: 50mm, Motor Cable Mounting Direction: Entry on Left Side, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 5, Controller Type - LEC, JXC: JXCD1, DeviceNetâ„¢, I/O Cable Length for LEC: No Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or I/O Cable Length

Size: 6, Motor Size: Standard, Lead Screw Type, mm: K (LEPS6: 4; LEPS10: 5), Stroke: 50mm, Motor Cable Mounting Direction: L (Entry on Left Side), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 3, Controller Type - LEC, JXC: 1P (LECP1, Programless Type, PNP), I/O Cable Length for LEC: 3 (3)

Size: 6, Motor Size: Standard, Lead Screw Type, mm: K (LEPS6: 4; LEPS10: 5), Stroke: 50mm, Motor Cable Mounting Direction: L (Entry on Left Side), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: B (15), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: No Cable, Controller Mounting: 8 (DIN Rail Mounting)

Size: 6, Motor Size: Standard, Lead Screw Type, mm: K (LEPS6: 4; LEPS10: 5), Stroke: 50mm, Motor Cable Mounting Direction: L (Entry on Left Side), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 5, Controller Type - LEC, JXC: CD1 (JXCD1, DeviceNetâ„¢), I/O Cable Length for LEC: No Cable, Controller Mounting: 7 (Screw Mounting), Communication Plug Connector

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L

CQS

Mounting Bolt for CDQSW/With Auto Switch Mounting bolt M3 X 35l X 40l X 45l X 50l X 55l X 60l M3 X 35l X 40l X 45l X 50l X 55l X 60l M5 X 45l X 50l X 55l X 60l Mounting bolt M5 X 65l X 70l X 75l X 80l X 85l X 90l M5 X 45l X 50l X 55l X 60l X 65l X 70l X 75l X 80l X 85l X 90l Model C Model C D 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 D 35 40 45 50 55 60 35 40 45 50 55 60 45 50 55 60

Smooth Cylinder/Low Speed Cylinder

CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.

Proposals for Energy Saving

Digital Flow Switch for Air Digital Flow Switch for Water Series PFA Series PFA Series PFW Series PFW New New 12000l 6000l 3000l Flow rate 40l 500l Photo Flow rate Photo 200l 100l 16l 50l Photo 4l Photo 10l Size (port size)) Size (port size) Maximum Flow Rate 3000, 6000, 12000l/min The addition of the high flow rate types supports energy saving measures.

Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

Table of Contents

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

Series IDG

Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.