Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type - JXC: -, Controller Mounting: -, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 1.5m, Communication Plug Connector: -, Controller Mounting: -

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 5m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 5m, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting

Table Accuracy: H (High Precision Type), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Table Accuracy: H (High Precision Type), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - JXC: CM1 (JXCM1, CC-Link, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector for DeviceNetâ

Table Accuracy: H (High Precision Type), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type - JXC: JXCM1, CC-Link, Direct Input Type, Controller Mounting: DIN Rail Mounting, Communication Plug Connector for DeviceNetâ„¢: Straight, for DeviceNetâ„

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: -

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B 3.2 4.4 3.3 USB (No.SFOD-OMT0007) 3.4 2.3 5.2 6.4 I/O 3.5 (1) LED ON PWR OFF RUN USB USB USB ALM LED PWR PWR Modbus 11 No.SFOD-OMT0009CN-B (2) /SMC/JXC Controller (N) OK 12 No.SFOD-OMT0009CN-B USB USB (3) 11.2 13 No.SFOD-OMT0009CN-B 3.6 (1) View(V) parameter Actuator selection 14 No.SFOD-OMT0009CN-B (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

Table Accuracy: H (High Precision Type), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.32; LER30: 1.2; LER50: 10), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.32; LER30: 1.2; LER50: 10, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: DIN Rail Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Series IDG

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (0.035SCFM) (inlet air pressure at 0.7MPa) (101.5psi).

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

Digital Flow Switches, Series PF2A, Series PF2W

/min 1l/pulse 10 to 210l/min 10 to 210l/min 20 to 200l/min 2l/min 2l/pulse 25 to 525l/min 25 to 525l/min 50 to 500l/min 5l/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).

PFA/PFW

to 4 (0.02 to 0.4) NPN PNP Rc 3/8 1/2 3/4 3/4 3/4 NPT 3/8 1/2 G 3/8 1/2 New PFW704 Integrated display type PFW720 New PFW740 PFW300 New PFW310 New PFW320 Display unit PFW301 New Separate type PFW311 New PFW321 New PFW504 Sensor unit PFW520 New PFW540 3 Series PFA Digital Flow Switch for Air How to order 10 02 27 PFA7 Flow rate range 1 to 10l/min 5 to 50l/min 10 50 Wiring specifications 1l

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer