Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - JXC: C51 (JXC51, Step Data Input Type, Parallel NPN), Controller Mounting: 7 (Screw Mounting)

Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - JXC: C61 (JXC61, Step Data Input Type, Parallel PNP), Controller Mounting: 7 (Screw Mounting)

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: DIN Rail Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - JXC: JXC51, Step Data Input Type, Parallel NPN, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Table Accuracy: High Precision Type, Size: 50, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - JXC: JXC61, Step Data Input Type, Parallel PNP, Controller Mounting: Screw Mounting, Communication Plug Connector for DeviceNetâ„¢: -

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5)

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Made to Order

CQS series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) (mm) Bore size (mm) Stroke Both of S1, S2 A B L 12 3.5 41 (51) 17 (22) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) -X -X 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in