Fluoropolymer Piping Equipment

5/32" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7

Battery-less

3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°)

Oscillation Angle A: [90°] External stopper, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 6.6, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Without

2

Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3

For post-stoppage positioning and locking

Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5 30 50 190 117 250 220 200 140 30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw

Protocol: EtherNet/IP™, Mounting: DIN Rail Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: High Precision Type, Body Size: 50, Max Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°

Protocol: PROFINET®, Mounting: DIN Rail Mounting, Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: High Precision Type, Body Size: 50, Max Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: 3 (3), Controller Option: D (DIN Rail Mounting)

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5), Controller Type - LEC, JXC: AN (LECPA, Pulse Input Type, NPN), I/O Cable Length for LEC: 1 (1.5), Controller Option: D (DIN Rail Mounting)

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Option: 8 (DIN Rail Mounting)

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: A (10), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Option: 8 (DIN Rail Mounting

Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: LECPA, Pulse Input Type, PNP, I/O Cable Length for LEC: 3, Controller Option: DIN Rail Mounting, Communication Plug Connector or I/O Cable

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: LECPA, Pulse Input Type, NPN, I/O Cable Length for LEC: 1.5, Controller Option: DIN Rail Mounting, Communication

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail Mounting

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 10, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller

Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 3, Controller: Step Data Input Type, PNP, I/O Cable Length: 3, Communication Plug Connector: None, Controller Option: DIN Rail Mounting

Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 3, Controller: Step Data Input Type, PNP, I/O Cable Length: 3, Communication Plug Connector: -, Controller Option: -