Motor Mounting Position: Basic Type, Lead: 8mm, Stroke: 50mm, Motor Option: w/o Option, Body Option: w/o Option, Mounting: w/o Side Holder, Actuator Cable Type, Length: 5m, Controller: C61 [Parallel Input (PNP)], Mounting: DIN Rail, I/O Cable: I/O Cable, 5m, Communication Plug Connector: -

Motor Mounting Position: Basic Type, Lead: 8mm, Stroke: 50mm, Motor Option: w/o Option, Body Option: w/o Option, Mounting: w/o Side Holder, Actuator Cable Type, Length: 5m, Controller: Ether Net/IPâ„¢, Mounting: DIN Rail, I/O Cable: -, Communication Plug Connector: -

In addition, the LES series is available in an optional symmetric style *.Reduced tact time - 5,000 mm/s¦ max. acceleration, 400 mm/s max. speed , Positioning repeatability: within ¦0.05 mm , Positioning pattern outputs: 64 points , Compact and space saving , Applicable strokes: 50, 75, 100, 150, RIGID ELECTRIC SLIDE TABLE ACTUATOR, ELECTRIC ACTUATOR, A34, 3.61 lb

In addition, the LES series is available in an optional symmetric style *.Reduced tact time - 5,000 mm/s¦ max. acceleration, 400 mm/s max. speed , Positioning repeatability: within ¦0.05 mm , Positioning pattern outputs: 64 points , Compact and space saving , Applicable strokes: 50, 75, 100, 150, HI RIGIDITY ELECTRIC SLIDE TABLE, ELECTRIC ACTUATOR, A34, 2.87 lb

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T21-R1 LQ3T21-R2 LQ3T21-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11

Battery-less

0.000 20 40 60 0.000 25 50 75 100 125 Load [N] Load [N] Load [N] LESYH16 LESYH16 Lr = 120 mm LESYH16 0.50 0.3 0.08 Table displacement [mm] Table displacement [mm] Table displacement [mm] LESYH16 -100 LESYH16 -100 LESYH16 -100 0.40 0.06 0.2 0.30 LESYH16 -50 0.04 LESYH16 -50 0.20 LESYH16 -50 0.1 0.02 0.10 0.000 100 200 300 400 0.000 50 100 150 200 0.00 50 100 150 200 Load [N] Load [N] Load

M-E05-1-LQ1

LQ1-4B10 LQ1U61-R5 6 6-25 LQ1-6N25 LQ1-6B25 3-06 LQ1-3N06 LQ1-3B06 Inch size Model Size A side B side Insert pin/Name plate symbol Part no.

AHC System Series MA

MA210-AM3 260 8 25 10 11 AHC unit 30 300 14 15 20 35 Tool adapter 100 742 AHC System Series MA2 Robot adapter MA210-C MA210-CS1 MA210-CR1, 2, 3, 4 MA210-CR5 50 50 50 AHC unit mounting hole 4 x 3.4 (PCD44.5) AHC unit mounting hole 4 x 3.4 (PCD44.5) AHC unit mounting hole 4 x 3.4 (PCD44.5) +0.022 0 10H8 11H8 +0.027 0 14H8 +0.027 0 15H8 +0.027 0 35 30 25 20H8 +0.033 0 8H8 +0.022 0 30h8

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

Vacuum Module Series ZX

ZX 36 A VJ10 1.8 (Mounting hole) ZR Rated voltage Lead wire length Symbol Rated voltage Lead wire color Symbol L mm ZM Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.) 600 3 Gray (2 pcs.)

Motor Mounting Position: R (Basic Type), Lead: K (8mm), Stroke: 50mm

Motor Mounting Position: Basic Type, Lead: 8mm, Stroke: 50mm, Motor Option: -, Body Option: -, Mounting: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

2

, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 380, 400, 415 VAC (50 Hz) 380 to 400, 400 to 415, 415 to 440 VAC (60 Hz) 440, 460 VAC (50 Hz) 440 to 460, 460 to 500 VAC (60 Hz) Outlet voltage Symbol 500 1 500 VA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 1000 2 1 kVA Singlephase 2000 2 kVA 3 4 9 200 VAC (50 Hz

10

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

For post-stoppage positioning and locking

2 x Rc3/8 14 12 25 220 25 140 60 60 R5 50 118 160 270 210 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw) 4 x 11 10.5 (Clamp block mounting hole) 4 x 13 through 18 4 x 26 counterbore depth 9 2 x 8H7 +0.015 0 118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read

Protocol: D (DeviceNetâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: S (Straight Type), Actuator: LESH, Body Size: 25, Motor Mounting: R (Basic Type), Lead: K (LES25: 8mm), Stroke: 50mm