High Vacuum Angle Valve

(Option) Amplifier Heater (Option) Ambient temperature: Max. 150C (Sensor) 2-color indicator An optional heater is available. Auto switches are mountable from 4 directions.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

XM, XY

part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Table of Contents

(Max. 150C) Heat resistant Sensor section: Rail Amplifier section: DIN rail Grommet D-F7NJL Wide range detection type Wide range detection D-G5NBL 8-30-50 Band Grommet This auto switch can be mounted by tie-rod with using mounting bracket. For details, refer to page 8-30-62.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60 87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Three body sizes

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 150mm, Motor Option: C (with Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 3 (3m)

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 150mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 150mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -,

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 150mm, Motor Option: with Motor Cover, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): -, I/O Cable Length for LEC: -, Controller

1

-XAl Change of rod end shape -XB6 Heat resistant cylinder (10 to 150C) * Not available with switch & with air cushion VMounted on the product. vPlease order separately.

1

) Symbol -XB6 2 Heat Resistant Cylinder (10 to 150C) Bore size Stroke How to Order Standard model no.

Made to Order

cylinder can create a gas that is hazardous to humans. 1729 C Made to Order Common Specifications: -XB6: Heat Resistant Cylinder (10 to 150C) Symbol -XB6 Heat Resistant Cylinder (10 to 150C) 2 CY3B series How to Order Temperature Range for Operating Cylinder and Piston Speed 1.

High Vacuum Angle Valve, XL Series

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm P/A test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

XL

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm SMC test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

ISO Cylinder

Symbol 1 Heat Resistant Cylinder (10 to 150C) -XB6 Air cylinder which changed the seal material and grease, so that it could be used even at higher temperature up to 150 from 10C.

Air Cylinder

-XAl Change of rod end shape -XB6 Heat resistant cylinder (10 to 150C) -XB7 Cold resistant cylinder (40 to 70C)*1 Mounting Brackets/Part No.