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Environment

LECSC-S5 LECSS-S5 Nil Without option B With lock 200 to 1500 LEH *3 Refer to the applicable stroke table for details.

Title not found

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

1

73 3/8 [1(P), 2(A), 4(B), 5(EA), 3(EB) port] 22.5 28.8 Note) These figures show the SY7200-5Z1-WO-B03F. 39 Directional Control Valves SY Metal Base Plug-in EX600 VM XT34 Side ported Bottom ported Top ported INDEX 40 Type 50, 51, 52 Series SY3000/5000/7000 Metal Base Plug-in Manifold Specifications D-sub connector Serial wiring Flat ribbon cable Model F type P type PH type PG type J type S5

2

Bending value (Reference) 20 Complies with FDA (Food and Drug Administration) 177-1550 Operating temperature Air, Inert gas: 20 to 200C, Water: 0 to 100C (No freezing) dissolution test.

Cylinder with Lock

CBH14 CDH9 EB EW L MR UBh14 XD 32 26 10 65 26 0.2 0.6 12 9.5 45 200 40 28 12 75 28 0.2 0.6 15 12 52 226 50 32 12 80 32 0.2 0.6 15 12 60 245 63 40 16 90 40 0.2 0.6 20 16 70 269.5 80 50 16 110 50 0.2 0.6 20 16 90 320 100 60 20 140 60 0.2 0.6 25 20 110 353.5 Pivot Bracket: Double Clevis Pivot Bracket Double clevis pivot bracket XD + Stroke Z + Stroke EM G1 CKH9 R1 B 90 l1 H6 E2 d2 l3 A CA S5

LEY-OM007

A * * 6 12 A N 5 10 8 16 30 LECPA A P * A * ( ) ( ) 4 3 2.5 500 [m] 1 * * * * C * B * A * 8 * 20 15 10 8 1.5 1 3 5 2 2 3 5 1 2 * 1630 ( 1 ) * 1 2 () 1 2 LEY25200 LEY32100 LEY16100 LEY25200 LEY32200 LEY32 30 150 200 250 300 150 200 250 300 30 50 100 350 400 450 500 50 100 350 400 450 500 LEY25 LEY16 LEY32 LEY32 LEY25 LEY16 / P.38 6.3 <> NPNPNP LEY16B

SFOD-OMT0009CN

LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 (a) ) LEY16RA-75LEY16RALEY16RA-100 (b) LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 (c) 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B

JXCx-OMT0001CN

LERH30K-3L LERH30K-3 0 (a) ) LEY16RA-75 LEY16RALEY16RA-100 (b) LEFSH() LEFS ) LEFSH25RH-300 LEFS25RH-300LEFS25RH-300 (C) (11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BR LEFS16A-100LEFS16A-100 -15No.JXC-OMT0001CN-C Execute()Execute Check box Execute Apply Apply 3.6 (2) -16No.JXC-OMT0001CN-C (2) 9. 512 2048 / 0 1 0 1 1 4 1 4 11 12 1 2 1 [] 11 1 4096 1 LEY16C-300 2.5mm 1/1 2 LEY16B

LEC-OM02904

DI1 DI2 DI3 Q173DCPUQ172DCPUQ173HCPUQ172HCPUQ170MCPUQD74MHQD75MH 3 8 3 3.3 3.3.1 9 L1L2L3AC200230VL1L2L3 LECSS2-S5 LECSS2-S7 LECSS2-S8 LECSS1-S5 LECSS1-S7 LECSS1-S8 L1L2L3 AC200230V50/60Hz L1L2L3 AC200230V50/60Hz L1L2 AC100120V50/60Hz L1L2 P()-D() P()-DPC PCD 14.214.5 3 9 3 () L11L21 LECSS2-S5 LECSS2-S7 LECSS2-S8 LECSS1-S5 LECSS1-S7 LECSS1-S8 L11L21 AC200~230V L11L21 AC100120V

LEC-OM02704CN

(2) 4[in](10.16[cm])100CFM(2.8m3/min) (3) SCCR(Short Circuit Current Rating) UL100kA (4) 15 [min] LECSC2-S5 LECSC2-S7 1 LECSC2-S8 LECSC1-S5 LECSC1-S7 2 A 12 (5) UL/C-UL (6) National Electrical Code , Canada Electrical Code LECSCLECSC40 A 13 1 111-17 1.1 12 1.1.1 CC-Link 12 1.1.2 13 1.1.3 14 1.2 16 1.3 18 1.4 1-10 1.5 1-12 1.6 1-13 1.6.1 1-13 1.7 1-14 1.8

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

Rotary Actuator

-X7 Angle adjusting screw "B" Angle adjusting screw "A" Rotation at 90 Heat resistant In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.

Fluoropolymer Tubing Variations

One-touch fittings, Insert fittings Fluoropolymer fittings: LQ series Note 3) Applicable Note 2) fittings Miniature fittings: M, MS series (Hose nipple type) 20C 0.7 0.25 0.1 Refer to the max. operating pressure curve. 1 0.4 0.2 0.7 0.25 0.1 1 0.4 0.2 1.5 0.55 0.3 1.7 0.6 0.3 2.3 0.85 0.4 100C Max. operating pressure (MPa) 200C How to measure the minimum bending radius.

High Vacuum Angle Valve

Heater (CE) Temperature specification Valve size 25 40 50 63 80 H4 (100C) XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 H5 (120C) XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 (2 sets) Example) For the XLA-80H5-2 with a heater, 2 sets of the XL1A25-60S-2 are required. Solenoid Valve/Plate Assembly Series Description (Construction no.)