HRX-OM-W002

Applicable model HRR012/018/024/030-A/W-T1 Rated flow50/60Hz*1 L/min 10 (0.28MPa) Maximum pump head Pump 50/60Hz*2 m 40 Output W 400 Circuit protector A 15 Recommended earth leakage breaker capacity A 15 The cooling capacity reduces about 300W from the value in the catalog.

HRX-OM-X084

Facility water temp. 25 1500 Cooling capacity[W] 1500 25 Cooling capacity[W] 32 32 35 35 1000 1000 500 500 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T1 is selected.

HRX-OM-R016

The cooling capacity will be reduced by 300W when option T and MT [High head pump] are selected. 5 Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temp. is lower than 10oC. 6 Outlet temp. when the circulating fluid flow is rated flow, and the circulating fluid outlet and the return are directly connected.

HRX-OM-W038

The cooling capacity will be reduced by 300W when option T [High pressure pump] are selected. 4 Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temp. is lower than 10 oC. 5 Outlet temp. when the circulating fluid flow is rated flow, and the circulating fluid outlet and the return are directly connected.

Size: 25, Motor Mounting Position: L (Left), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 30mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male), Mounting: F (Rod Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Size: 25, Motor Mounting Position: L (Left), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: D (Double Clevis), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Size: 25, Motor Mounting Position: Left, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: Double Clevis, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector

Size: 25, Motor Mounting Position: Left, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 30mm, Motor Option: w/Motor Cover, Rod End Thread: Male, Mounting: Rod Flange, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Except cable specifications and actuator options) Example: Enter LEMB25T-300 for the LEMB25T-300W-S12N1. Number of step data (Points) I/O cable length [m] 2 2 stroke end points/ 12 intermediate points (Programless) Nil Without cable 1 1.5 3 3 5 5 Parallel I/O type N NPN P PNP The controller is sold as single unit after the compatible actuator is set.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Compatible motor Actuator part number P Step motor (Servo/24 VDC) (Except cable specifications and actuator options) Example: Enter LEMB25T-300 for the LEMB25T-300W-S12N1.

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 300mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m)

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: W (with Lock/Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 3 (3m)

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: In-line Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 300mm, Motor Option: with Lock/Motor Cover, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): -, I/O Cable Length for LEC: -, Controller

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

2

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Fittings Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model