Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: Without

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 300mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: JXC61, Parallel PNP, Step Data Input Type, I/O Cable Length for

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

2

150 Nil C D Nil H L S 300 300 75 Auto-drains listed on page 95 are attached.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Battery-less

16 30, 50, 100, 150, 200, 250, 300 Motor 30 to 400 25 30, 50, 100, 150, 200, 250, 300, 350, 400 30 to 500 32/40 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 i Mounting*5 o Actuator cable type/length Robotic cable [m] Nil None R8 8*10 R1 1.5 RA 10*10 R3 3 RB 15*10 R5 5 RC 20*10 Symbol Type Motor mounting position Parallel In-line Nil Ends tapped/ Body bottom tapped*6 V V L Foot V

Table of Contents

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

VQZ1000/2000/3000

83 (Metal seal) 300 (Lead wire length) 55 81 (Rubber seal) Indicator light Indicator light 61 47.5 <52.5> R1 R2 R1 R2 P P 82 Cover diameter 1.5 76 Cross section 0.23 mm2 < >: AC < >: AC 2-7-39 Base Mounted 40 40 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1250 1(R)-G-01 23.4 mounting hole 300 (Lead wire length) 95 47.5 18 7.2 7.2 3 R3 4 2 22 10 SMC SMC

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.