Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 300mm, Motor Option: with Lock/Motor Cover, Rod End Thread: Female, Mounting: Foot, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: Without

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

Environment

Lead 8: LEY40B 27 40 20 30 Lead 16: LEY40A 13 20 Lead 16: LEY40A 0 0 0 300 400 500 200 100 600 0 300 400 500 200 100 600 Speed [mm/s] Speed [mm/s] 225 LEY Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Refer to page 224 for the LECP6, LECP1, LECPMJ, and page 225 for the LECPA.

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 500mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m)

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 500mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

2

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Fittings Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

Battery-less

1 Actuator cable type/length Robotic cable [m] Nil None R8 8*7 R1 1.5 RA 10*7 R3 3 RB 15*7 R5 5 RC 20*7 Nil Housing B bottom*6 Housing B bottom K Body bottom 2 locations Body bottom For details on auto switches, refer to the Web Catalog. 21 Battery-less Absolute Encoder Type Slider Type/Ball Screw Drive LEFS Series Battery-less Absolute (Step Motor 24 VDC) !

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

Table of Contents

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

For post-stoppage positioning and locking

Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

Size: 40, Motor Mounting Position: L (Left), Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 300mm, Motor Option: W (with Lock/Motor Cover), Rod End Thread: Female, Mounting: L (Foot), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 1P (LECP1, PNP, Programless Type), I/O Cable Length for