1

)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

High Vacuum Angle Valve

Flange side Left flange surface Rear flange surface Right flange surface N1 P1 Q1 R1 R2 R3 S1 T1 U1 Kalrez Flange: Temperature specifications Chemraz Symbol Nil 5 to 60C 5 to 150C H0 Temperature Heater VMQ FKM FOR PLASMA ULTIC ARMOR Auto switch type (Operating temperature 5 to 60C) Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd.

Aluminum High Vacuum Angle Valve

Flange side Left flange surface Rear flange surface Right flange surface N1 P1 Q1 R1 R2 R3 S1 T1 U1 Kalrez Flange: Temperature specifications Chemraz Symbol Nil 5 to 60C 5 to 150C H0 Temperature Heater VMQ FKM FOR PLASMA ULTIC ARMOR Auto switch type (Operating temperature 5 to 60C) Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd.

2

/8 02 R1/4 03 R3/8 04 R1/2 Fittings Applicable tubing O.D.

High Vacuum Angle Valve, XL Series

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm P/A test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

XL

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm SMC test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

High Vacuum Angle Valve

(Option) Amplifier Heater (Option) Ambient temperature: Max. 150C (Sensor) 2-color indicator An optional heater is available. Auto switches are mountable from 4 directions.

Air Cylinder

ND CJ1 MM R1 MM CJP ND E1 NX1 A U1 R2 H Z E1 NX U1 LB A A NX A1 CJ2 A1 U1 LB JCM Part no.

CATALOG

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

smcmaintenancepartslist

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.

Table of Contents

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

Air Cylinder

Applicable bore size (mm) A A1 E1 L1 MM R1 U1 ND NX NZ L Included pin part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

Fluoropolymer Piping Equipment

LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 LQ1 6 x 4 3/8" x 1/4" 2 3 LQ3 LQ3 10 x 8 1/2" x 3/8" 4 3 LVN 8 x 6 3/4" x 5/8" 5 LQHB 12 x 10 4 1" x 7/8" TL TIL 6 19 x 16 5 1 1/4" x 1.1" 7 TLM TILM Note) For

MB

MB XB6 With heavy duty scraper Specifications Heat resistant cylinder (150C) Specifications Action Cushion Wiper ring Double acting, Single Double rod Air cushion/Rubber bumper SCB scraper Double acting, Single/Double rod 10C to 150C Unavailable for mounting Air cushion Fluorine rubber Heat resistant grease Action Ambient temp.

XM, XY

surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Right flange surface Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA Symbol Auto switch Without auto switch (without built-in magnet) Remarks Temperature range 5 to 60C 5 to 150C

MB1

) XB6 2 5 The cylinder seals are changed to a heat resistant (to 150C) material, for use under severe conditions which exceed the standard specifications of 10C to +70C.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

R1 O1 thread R1 O1 32 40 M6 x 1.0 M6 x 1.0 10 10 14 18 50 63 M8 x 1.25 M10 x 1.5 80 M12 x 1.75 M12 x 1.75 22 22 100 DL Head end lock LL 4N through H thread effective depth C Rod end lock DM RF End lock mechanism WL 2 x 4O counterbore depth R ( ) Manual release Non-lock type I HR D M Z E 2-P (Port size) K M E Q A + Stroke B + Stroke F B + Stroke L Q Q J W A + Stroke End Lock Mechanism Dimensions

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 I-G02SUS Y-G02SUS 20 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25