Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0 1 2 3 4 5 6 7 8 9 10 1112 13 1415 Distance from cylinder shaft center Lo (cm) CX CY1R63 CY1R10 Fn H H 1000 DAllowable driving force Fn (N) Allowable driving force Fn (N) 50 500 Lo 40 30 20 400 L -X 300 H 200 10 100 2020 30 40 50 Usable range 5 Usable range Data 1 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 10 7 8 9 0 1 2 3 4 5 6 7 8 9 10 1112 13 1415 Distance from cylinder

High Vacuum Angle Valve

Dimensions XLC-100/160-1-X152: Air operated (b) D C E E C E Fn (KF flange) Fd (K flange) (a) (c) J H K [mm] Model A B C D E1 Fn Fd G H J K XLC-100-1-X152 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160-1-X152 138 339 200 65 11 190 180 153 124 62 12.5 B A 1 The E dimension applies when the heater option is included.

CY1

Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data A . 100 20 30 40 50 10 L type Usable range 5 10 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 Load Work piece Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1B10 CY1B40 500 L type H type Fn Allowable driving force Fn (N)

Table of Contents

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

Usable range Usable range RHC 10 10 10 5 5 5 MK(2) RS Q G 1 1 0 2 3 4 5 6 7 8 9 101112131415 1 1 0 2 3 4 5 6 8 9 10 11 13 1 1 0 2 3 4 5 6 7 8 9 101112131415 7 12 RS H A Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) RZQ 50 63 1000 1000 MI W S Recommended driving force Fn (N) Recommended driving force Fn

Basic Type/Direct Mount Type

) CY3R10 CY3R40 500 Allowable driving force Fn (N) Allowable driving force Fn (N) 300 50 200 40 30 20 100 20 30 40 50 10 Usable range 5 10 Usable range 5 1 0 1 2 3 4 5 6 1 7 8 9 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R15 CY3R50 H 1000 Allowable driving force Fn (N) Allowable driving force Fn (N) 50 500

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

Magnetically Coupled Rodless Cylinder

from cylinder shaft center Lo (cm) 3 Model Selection Method Series CY3B/CY3R Precautions on Design q CY3R15 CY3R32 400 300 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 Useable range 10 10 Useable range 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

from cylinder shaft center Lo (cm) 3 Model Selection Method Series CY3B/CY3R Precautions on Design q CY3R15 CY3R32 400 300 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 Useable range 10 10 Useable range 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Industrial Filters

65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B)

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

Sine Rodless Cylinder Series REBR Direct Mount Type

7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.