High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H E B L M C M 3 4 LQ1E12 LQ1E11 1/8 18.5 11.5 10 2 4 Class 1 LQ1E52 LQ1E51 LQ1E42 LQ1E41 LQ1E33 LQ1E32 LQ1E31 LQ1E22 LQ1E21 12 19 10 12 6 8 10 4 6 14 28 16.5 4 6 15 17 36.5 23 5 9 20 B L (E) C M 21 43 28 6 9 24 SMC 1/4 26 54 39 7 14 29 C L H (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Fitting Type: E (Union Elbow), Size Combination-A Side: 21 (Applicable Tubing Size mm 6x4)

Fitting Type: Union Elbow, Size Combination-A Side: Applicable Tubing Size mm 6x4, Different Diameter-B Side: -, Packaging: -

Type: E (Union Elbow), Size Combinations: 21 (6 x 4)

Type: Union Elbow, Size Combinations: 6 x 4, Fitting Type: -

Series AP500

Body Poppet 316L SS Diaphragm 316L SS Nozzle Code S SHP SH 316L SS secondary remelt 316L SS Seat material Hastelloy C-22 Hastelloy C-22 Code Material PCTFE (Standard) PTFE 3) Hastelloy C-22 Hastelloy C-22 No code TF H 3) PTFE recommended for applications such as within a process tool.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Table of Contents

NE CX RR2 SS H PP2 QQ PP1 QQ Back port NH NC (Refer to P. 8-12-3.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEC LEC S LEC SS-T LEC Y LEC Y Motorless Component Parts No. Description Material Note No.

15

LEC SS-T 12. When mounting the actuator using the body mounting reference plane, use a pin. Set the height of the pin to be 5 mm or more because of round chamfering.

Table of Contents

Order the seal kit, based on each bore size. 8-29-20 21 Dual Rod Cylinder: With End Lock For Retracting Side Series CXS Dimensions: 6, 10, 15 CXS6-R ZZ SS MX MTS 3 3 MY Manual lever insertion CY (mm) 1.7 ZZ SS Model CXS6-10R CXS6-20R CXS6-30R CXS6-40R CXS6-50R MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

JIS Standard Hydraulic Cylinder

NB B SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 25 to 1400 58 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 62 38 52 40 23 15 M10 x 1.25 25 to 1400 65 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 69 45 52 52 1

Series AK1000

Code Connections NPT 1/4 inch 1/4 inch compression 3/8 inch compression Material 4 4T 6T Code Body Brass Poppet Diaphragm Seat material B S SH Code Material PCTFE (Standard) Vespel 3) PEEK 316 SS 316 SS No code VS PK 316 SS Hastelloy C-22 Hastelloy C-22 Ports 3) Not available with SH material.

SL5200

Hastelloy C-22 Diaphragm S SH 316L SS secondary remelt 316L SS 4) Not available with SH material.

Hydraulic

NB B SS+ Q + l + Stroke S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod M10 x 1.25 32 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 21.5 15 52 25 to 1400 M10 x 1.25 40 65 69 45 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 12 15 52 52 25

MY1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PD (Hexagon socket head plug) YH QQ PP QQ RR SS RR SS H NH NE NC PP TT TT GA GA UU UU Cushion needle M5 x 0.8 (Port) 2-M5 x 0.8 G G 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke

MY1

PP 7.5 11.5 V V 10 12.5 QQ 9 11 XX 22 24 TT 9 10.5 RR 11 14.5 UU 10.5 12 SS 3 5 Model MY1H16G MY1H20G "P" indicates cylinder supply ports.

CXS

CXS -R 10 15 ZZ SS Z (Z) Manual lever insertion 1.7 Dual-Double-Rod Type CXSW K KK Hexagon (O) (Z) (mm) O K Width across flats 12 Model CXS10-R 6.5 8.5 Width across flats 13 CXS15-R (mm) Symbol ZZ Z SS KK 50 Stroke 10 20 50 40 30 10 20 30 40 50 10 50 40 30 20 10 20 30 40 Model 19.5 80 90 100 115 125 30 97 107 117 132 142 24.5 40 50 CXS10-R 20.5 90 100 110 120 130 35 109 119 129 139 149 45

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

B SS + Q + l + Stroke S + Stroke FX H M ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS e f Q 32 M10 x 1.25 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 52 12 15 25 to 1400 50 M10 x

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Order the seal kit, based on each bore size. 8-29-20 21 Dual Rod Cylinder: With End Lock For Retracting Side Series CXS Dimensions: 6, 10, 15 CXS6-R ZZ SS MX MTS 3 3 MY Manual lever insertion CY (mm) 1.7 ZZ SS Model CXS6-10R CXS6-20R CXS6-30R CXS6-40R CXS6-50R MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local