Size Combinations: A Side: 1/2" x 3/8"; Side B: Body Size 2

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Fitting Type: E (Union Elbow), Size Combination-A Side: 4A (Applicable Tubing Size 1/2" x 3/8", Flange 15A), Different Diameter-B Side: Same Diameter (B Side), Packaging: 1 (Standard Packaging Equivalent to Class M5.5)

Fitting Type: Union Elbow, Size Combination-A Side: Applicable Tubing Size 1/2" x 3/8", Flange 15A, Different Diameter-B Side: Same Diameter (B Side), Packaging: Standard Packaging Equivalent to Class M5.5

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Table of Contents

R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type

42

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P)

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

VQZ1000/2000/3000

) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

VQ7-6/7-8

VV72-P-03, 04 R1, R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19ASilencer box AXT512-26A 1 2 SMC SMC 223.5 211.5 183.5 171.5 140 PA B 80.5 120.5 PE PE PE PA P PE PE P 78 R2 R1 R1 R2 EA EB EB EA A Individual EXH spacer: VV72-R2-Rc3/8, 1/2 Individual SUP spacer: VV72-P2-Rc3/8, 1/2 R1, R2 individual EXH spacer: VV72-R2-04 2-Rc1/2 Reverse pressure spacer: AXT512-19A2-Rc3

VQ7-6/7-8

R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type

0.4

) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) r VQ1C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component Parts No.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

VFS

Port Specifications Porting specifications: Rc (Connecting port size) Passage Symbol Valve 4(A), 2(B) Base 5(R1), 3(R2) Base 1(P) Side/Rc 1/8 5(R1), 3(R2) Common 1(P) Common 1 Top/Rc 1/8 Side/Rc 1/8 Option Blanking plate VVFS1000-10A-1 With gasket, screw Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

VQ5000

(A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5451 VQ5450 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5551 (A) 4 (B) 2 VQ5550 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3 Description Material Note No. 1 2 3 Body Spool/Sleeve Piston Body Spool valve Piston Die cast aluminum Stainless steel Resin

SYJ3000/5000/7000

SYJ7000: 8 mm JIS Symbol 2 position double 2 position single 3 position closed center 3 position exhaust center 3 position pressure center Body ported (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1-5-72 73 Series SYJ5000/7000 Made to Order Specifications: DIN Terminal

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Flow Control Equipment Pressure Switches/ Pressure Sensors 3(R2) 1 (P) (R1)5 3 position pressure center i 2(B) (A)4 5 (R1) 1 (P) 3 (R2) 3(R2) 1 (P) (R1)5 (This figure shows a closed center type.)

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)