3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

75 0 1 01 02 M plug connector (M): VQZ225 (R)lMl 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 300 122.5<124.5> 61.5<62.5> 73.5 147 58.5<63.5> < >: AC 1.12-41 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 3 position closed center/exhaust center/pressure center 3 4 5 0 1 01 02 Grommet(G): VQZ2 5 (R)lGl 300 122 24.5Mounting holes (Lead wire length) 54.5 9 9 R4

KB

L2 A L1 D Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 17.8 28.5 33.8 57.1 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 28.0 33.5 38.5 39.0 14 17 19 24 13.6 17.6 25.2 27.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 Kl Ml Hl Dl MS Tl 2.1-78 Series KB 3 Other Piping Material Nipple: KBN Weight (g) Part No.

Low torque Metal seal type Rotary joint

R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

KJ

KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4

Table of Contents

KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4

Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5 Cross section 0.23mm2 45(46) : AC : AC 2.10-28 VQZ100/200/300 Base Mounted Dimensions: VQZ200 Valve single unit Grommet (G): VQZ2l5(R)-lGl01 02 2-4.5 Mounting holes 4 32 19.2 Manual override Cover dia 1.6 Cross section 0.34mm2 R4

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Fitting Type: E (Union Elbow), Size Combination-A Side: 51 (Applicable Tubing Size mm 19x16)

Fitting Type: Union Elbow, Size Combination-A Side: Applicable Tubing Size mm 19x16, Different Diameter-B Side: -, Packaging: -

•

H : X I . tJ4(iii E 14.5 5 1.8 F G F G Y 1I4( t:: I . , 145 5 1.8 ,ZPY4OD 40 43 29 39 57 251 83 15 173 17 M ... 41 20 ~ 25 ~r4 42 83 88 7 U6\S) 1 6.5 7 2.5 U6t~) 16.5 7 2.5 16 16 116 26 28 Series ZPY/Without Buffer Connection Connection Port:Bard Fitting Pad Type Bellows -Vacuum Entry Horizontal Type Mounting Male Thread 1"6,1"8 20,25,32 H T Bellows type Bellows type p H '60 ."

MLGC

Note) $1, %4 will not be required for the one without rear plate. 9-4-6 7 Fine Lock Cylinder with Guide Series MLGC Dimensions Basic style: With rear plate MLGCB--R4-F through Counterbore G Back side 4-H 2-O through Rear plate P Head side cylinder port BP Unlocking port Unlocked when pressurized CL CL1 P Rod side cylinder port MLGC W U A' CNG MNB Courtesy of Steven Engineering, Inc.-230

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: M (Fixed SI Unit), Stations: 4, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge; 0.2 MPa)

MLGC

Note) $1, %4 will not be required for the one without rear plate. 9-4-6 7 Fine Lock Cylinder with Guide Series MLGC Dimensions Basic style: With rear plate MLGCB--R4-F through Counterbore G Back side 4-H 2-O through Rear plate P Head side cylinder port BP Unlocking port Unlocked when pressurized CL CL1 P Rod side cylinder port MLGC W U A' CNG MNB BP Lock port for pressure lock (Plug with

V100

Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ25(R)-G01 02 2-4.5 mounting hole 19.2 4 32 Manual override Cover dia. 1.6 Cross section 0.34 mm2 R4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ25(R)-G01 02 2-4.5 mounting hole 19.2 4 32 Manual override Cover dia. 1.6 Cross section 0.34 mm2 R4

Rated Distance Range: F (0.01 to 0.03mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Unit Specification: M (Fixed SI Unit), Stations: 1, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge, 0.2 MPa), 2 Port Solenoid Valve Rated Voltage: 2 (110 VAC)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Tl o,r to,ctrftnsrot7t ibe ggilfi to,,ctn'i"sltqtube lf thre are morc than 10 stations, supply air and exhaust fro.n both sides of manifold, NVZ50OO Proper Vahte, Ge-sket, Manifold / Suhplate Combinatiotts of Sol.enoid Manifold Mounting of |{VZ5OO And N\Z$OOO Adaptor plate ass'y DXT20t-3-tA Adaptor plate ass'y DXT2o|-3-24 . subptate DXTl99-7l TP (llNf'tD . subprerB DXT199-7-2TP (r4 NPTR

Stainless Steel Regulator Series NSR

Fluoro resin t'a'iao.hs N 46226 LSA F3x lji 3s9 Jro2 T..i 27 2.r4 l'rillimeter in Parentheses