3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

75 0 1 01 02 M plug connector (M): VQZ225 (R)lMl 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 300 122.5<124.5> 61.5<62.5> 73.5 147 58.5<63.5> < >: AC 1.12-41 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 3 position closed center/exhaust center/pressure center 3 4 5 0 1 01 02 Grommet(G): VQZ2 5 (R)lGl 300 122 24.5Mounting holes (Lead wire length) 54.5 9 9 R4

KB

L2 A L1 D Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 17.8 28.5 33.8 57.1 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 28.0 33.5 38.5 39.0 14 17 19 24 13.6 17.6 25.2 27.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 Kl Ml Hl Dl MS Tl 2.1-78 Series KB 3 Other Piping Material Nipple: KBN Weight (g) Part No.

Low torque Metal seal type Rotary joint

R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

KJ

KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4

Table of Contents

KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4

Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5 Cross section 0.23mm2 45(46) : AC : AC 2.10-28 VQZ100/200/300 Base Mounted Dimensions: VQZ200 Valve single unit Grommet (G): VQZ2l5(R)-lGl01 02 2-4.5 Mounting holes 4 32 19.2 Manual override Cover dia 1.6 Cross section 0.34mm2 R4

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

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H : X I . tJ4(iii E 14.5 5 1.8 F G F G Y 1I4( t:: I . , 145 5 1.8 ,ZPY4OD 40 43 29 39 57 251 83 15 173 17 M ... 41 20 ~ 25 ~r4 42 83 88 7 U6\S) 1 6.5 7 2.5 U6t~) 16.5 7 2.5 16 16 116 26 28 Series ZPY/Without Buffer Connection Connection Port:Bard Fitting Pad Type Bellows -Vacuum Entry Horizontal Type Mounting Male Thread 1"6,1"8 20,25,32 H T Bellows type Bellows type p H '60 ."

MLGC

Note) $1, %4 will not be required for the one without rear plate. 9-4-6 7 Fine Lock Cylinder with Guide Series MLGC Dimensions Basic style: With rear plate MLGCB--R4-F through Counterbore G Back side 4-H 2-O through Rear plate P Head side cylinder port BP Unlocking port Unlocked when pressurized CL CL1 P Rod side cylinder port MLGC W U A' CNG MNB Courtesy of Steven Engineering, Inc.-230

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: M (Fixed SI Unit), Stations: 4, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge; 0.2 MPa)

MLGC

Note) $1, %4 will not be required for the one without rear plate. 9-4-6 7 Fine Lock Cylinder with Guide Series MLGC Dimensions Basic style: With rear plate MLGCB--R4-F through Counterbore G Back side 4-H 2-O through Rear plate P Head side cylinder port BP Unlocking port Unlocked when pressurized CL CL1 P Rod side cylinder port MLGC W U A' CNG MNB BP Lock port for pressure lock (Plug with

V100

Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ25(R)-G01 02 2-4.5 mounting hole 19.2 4 32 Manual override Cover dia. 1.6 Cross section 0.34 mm2 R4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ25(R)-G01 02 2-4.5 mounting hole 19.2 4 32 Manual override Cover dia. 1.6 Cross section 0.34 mm2 R4

Rated Distance Range: F (0.01 to 0.03mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Unit Specification: M (Fixed SI Unit), Stations: 1, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge, 0.2 MPa), 2 Port Solenoid Valve Rated Voltage: 2 (110 VAC)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Tl o,r to,ctrftnsrot7t ibe ggilfi to,,ctn'i"sltqtube lf thre are morc than 10 stations, supply air and exhaust fro.n both sides of manifold, NVZ50OO Proper Vahte, Ge-sket, Manifold / Suhplate Combinatiotts of Sol.enoid Manifold Mounting of |{VZ5OO And N\Z$OOO Adaptor plate ass'y DXT20t-3-tA Adaptor plate ass'y DXT2o|-3-24 . subptate DXTl99-7l TP (llNf'tD . subprerB DXT199-7-2TP (r4 NPTR

Stainless Steel Regulator Series NSR

Fluoro resin t'a'iao.hs N 46226 LSA F3x lji 3s9 Jro2 T..i 27 2.r4 l'rillimeter in Parentheses

Shock Absorbers and Rate Controls

0 3.41 N/A N/A 1.25 ,oJ Pfl22otf -1, -2, .3 8.14 8.34 rya(rr)r r4-l? utllF .38 l,13 l.?0 i.03 L I /A r{/ALl2 .tti, Pm225tI t, -2, -3 8 . 1 4 8.34N/A llF) lYo-12 UNt .38 l.t 3 t.?0 5.03 21 t{/a N/A 1,25 .0J P[152flt -1, .2, -3 5.68 0.J/ 1.73(rFl r%.r? ul{ .501.481.753.63 /A l.v 1.19[/a !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 55.5 Indicator light Cover diameter 1.5 Cross sectional area 0.23mm2 45 27 Series VQZ Base Mounted Type Dimensions: VQZ200 Dimenisons: VQZ200 (mm) Valve Scale: 45% Grpmmet (G): VQZ2 5(R)G 01T 02T 2 4.5 Mounting holes 4 32 19.2 Manual override Cover diameter 1.4 R4