Class: Class 3, Tubing Size: 11 (3/8"x1/4"), Piping, Thread: 1 (Male Thread for Blanking Plug), Packaging: 1 (Tubing Plug Nut Material: PFA; Standard Packaging Equivalent to Class M5.5)

Class: Class 3, Tubing Size: 3/8"x1/4", Piping, Thread: Male Thread for Blanking Plug, Packaging: Tubing Plug Nut Material: PFA; Standard Packaging Equivalent to Class M5.5

Class: -, Tubing Size: -, Piping, Thread: -, Packaging: -

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Fluoropolymer Piping Equipment

LVW 1 1 2 3 3 4 5 6 1 2 1 1 2 1 1 1 1 2 3 4 5 6 7 A A A A A A A 4 x 3 3 x 2 6 x 4 10 x 8 8 x 6 12 x 10 19 x 16 25 x 22 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" 1 1/4" x 1.1" 1 1/2" x 1.33" LQ1 LQ3 LQ3 LVN 8 A LQHB P: Without panel mounting Note) For details of the applicable tubing sizes, refer to page 945.

Fluoropolymer Piping Equipment

Metric Size Inch Size 4 3 Size Series Appearance LVQ 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 25 1 2 3 4 5 6 LVP Bore through connector LQHB LVW LQ1 LQ3 LQ3 High Purity Fluoropolymer Tubing P.947 LVN LVN Series Tubing O.D.

Process Pump

2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

25

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A SN LQ3 LQ3 fittings Caution 1.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Series LQ3 High Purity Fluororesin Fitting

Combination 1 2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol

PVC Quick Drain Valve

hydroxide Temperature 40C or less Isobutyl alcohol Note 1), 2) Temperature 40C or less Isopropyl alcohol Temperature 40C or less Note 1), 2) Hydrochloric acid Concentration 30% or less Note 2) Hydrogen peroxide Concentration 5% or less, Temperature 50C or less Nitric acid (except fuming nitric acid) Concentration 10% or less, Temperature 40C or less Note 2) Deionized water Sodium hydroxide

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

Secondary Batteries

1 1 1 1 Foot x 2, Mounting bolt x 8 Flange x 1, Mounting bolt x 4 Trunnion pin x 2, Trunnion bolt x 2, Flat washer x 2 Clevis x 1, Mounting bolt x 4, Clevis pin x 1, Retaining ring x 2 Pivot bracket x 1 13 Air Cylinder: Standard Type Double Acting, Single Rod 40, 50, 63, 80, 100 CDA2 Series 9091How to Order CDA2 L 50 100 M9BWL 90 With auto switch Series compatible with secondary batteries

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

Class: Class 5, Tubing Size: 19 [3/4"x5/8" (ø19 x ø16)], Piping, Thread: 2 (Tube Piping for Tubing Plug), Packaging: 1 (Tubing Plug Nut Material: PFA; Standard Packaging Equivalent to Class M5.5)

Class: Class 6, Tubing Size: 25 [1"x7/8" (ø25 x ø22)], Piping, Thread: 2 (Tube Piping for Tubing Plug), Packaging: 1 (Tubing Plug Nut Material: PFA; Standard Packaging Equivalent to Class M5.5)

Class: Class 4, Tubing Size: 13 (1/2"x3/8"), Piping, Thread: 2 (Tube Piping for Tubing Plug), Packaging: 1 (Tubing Plug Nut Material: PFA; Standard Packaging Equivalent to Class M5.5)

Class: Class 2, Tubing Size: 07 (1/4"x5/32"), Piping, Thread: 2 (Tube Piping for Tubing Plug), Packaging: 1 (Tubing Plug Nut Material: PFA; Standard Packaging Equivalent to Class M5.5)