Fitting Type: Branch Tee, Size Combination: Tubing: 1" x 7/8"; Thread: 1/2", Piping Type: Female, Thread: NPT, Packaging: Packaging Equivalent to Class M5.5

Fitting Type: Branch Tee, Size Combination: Tubing: 1" x 7/8"; Thread: 1/2", Piping Type: Female, Thread: NPT, Packaging: Packaging Equivalent to Class M3.5 w/PVDF Nut

Fitting Type: B (Branch Tee), Size Combination: 6A (Tubing: 1" x 7/8"; Thread: 1/2"), Piping Type: F (Female), Thread: N (NPT), Packaging: 2 (Packaging Equivalent to Class M3.5 w/PVDF Nut)

Table of Contents

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data (A).

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data (A).

High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.

CY1

Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data A . 100 20 30 40 50 10 L type Usable range 5 10 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 Load Work piece Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1B10 CY1B40 500 L type H type Fn Allowable driving force Fn (N)

Table of Contents

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

Usable range Usable range RHC 10 10 10 5 5 5 MK(2) RS Q G 1 1 0 2 3 4 5 6 7 8 9 101112131415 1 1 0 2 3 4 5 6 8 9 10 11 13 1 1 0 2 3 4 5 6 7 8 9 101112131415 7 12 RS H A Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) RZQ 50 63 1000 1000 MI W S Recommended driving force Fn (N) Recommended driving force Fn

REA/REB

2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) REAR25 REAR15 REAR40 500 500 300 300 200 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 20 30 40 50 30 40

Basic Type/Direct Mount Type

) CY3R10 CY3R40 500 Allowable driving force Fn (N) Allowable driving force Fn (N) 300 50 200 40 30 20 100 20 30 40 50 10 Usable range 5 10 Usable range 5 1 0 1 2 3 4 5 6 1 7 8 9 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R15 CY3R50 H 1000 Allowable driving force Fn (N) Allowable driving force Fn (N) 50 500

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Magnetically Coupled Rodless Cylinder

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)