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Fluoropolymer Piping Equipment

Connection threads Rc/NPT E E H L L M Min. port size W Y LQ3H1A-F 1/8" 1/8" 10 9 11 35 34 14 2 10 18.5 LQ3H2A-F 1/4" 1/8" 17 16 16 40 39 20 4 14 18.5 LQ3H2B-F 1/4" 45 44 21.5 LQ3H3A-F 3/8" 1/8" 22.5 19.5 21 50.5 47.5 25 6.4 18 18.5 LQ3H3B-F 1/4" 55 52 21.5 LQ3H3C-F 3/8" 55.5 52.5 25 LQ3H4A-F 1/2" 1/4" 24.5 22.5 24 55.5 53 29 9.5 22 21.5 LQ3H4B-F 3/8" 58 56 25 LQ3H4C-F 1/2" 66 64 29.5 LQ3H5A-F

(in) D (D1): 3/8, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 3

Fitting Type: H (Straight), Size Combination: 3A (Tubing: 3/8" x 1/4"; Thread: 1/8"), Piping Type: M (Male), Thread: N (NPT)

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

5 Port Solenoid Valve Series SY3000/5000/7000/9000

1 100 VAC 2 200 VAC + + 3 110 VAC [115 VAC] LN, MN type: with 2 sockets.

Table of Contents

Composite Center of Gravity Calculation m3 = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525 kg 1 m3 X = x (mn x xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5 mm 1 m3 Y = x (mn x yn) 1 6.525 = (0.88 x 0 + 4.35 x 0 + 0.795 x 111 + 0.5 x 210) = 29.6 mm 1 m3 Z = x (mn x zn) 1 6.525 = (0.88 x 5 + 4.35 x 42.5 + 0.795 x 42.5 + 0.5 x 42.5) = 37.4 mm 4.

Swivels

Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-7 Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings In-Line PS Series Swivels Female Pipe Male 37 Flare A Part Number A B Hex 1 Hex 2 Port 1 Port 2 B Hex 2 PS410203-4-4 2.84 2.08 .75 1.19 1/4-18 7/16-20 72.0 mm 53.0 mm 19.0 mm 30.2 mm NPTF UNF-2A Hex 1 Port 2 PS610203-6-6 3.03 2.18

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

V100

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

MY1

Composite Center of Gravity Calculation m3 = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525 kg 1 m3 X = x (mn x xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5 mm 1 m3 Y = x (mn x yn) 1 6.525 = (0.88 x 0 + 4.35 x 0 + 0.795 x 111 + 0.5 x 210) = 29.6 mm 1 m3 Z = x (mn x zn) 1 6.525 = (0.88 x 5 + 4.35 x 42.5 + 0.795 x 42.5 + 0.5 x 42.5) = 37.4 mm 4.

MY1

Wn Mass mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88kg 65mm 0mm 5mm 111 Wb 4.35kg 150mm 0mm 42.5mm Y 210 Y Wc 0.795kg 150mm 111mm 42.5mm Wd 0.5kg 150mm 210mm 42.5mm n = a, b, c, d 3 Calculation of composite center of gravity m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x yn) 1 6.525

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

To order connector cable only Connector dimensions 4 Brown: 1 Blue: 3 9 3 1 Black: 4 33.9 L 35 10 Cable length (L) Part no. 300 mm V100-49-1-1 500 mm 1000 mm 2000 mm 5000 mm V100-49-1-2 V100-49-1-3 V100-49-1-4 V100-49-1-7 3000 mm V100-49-1-5 4000 mm V100-49-1-6 Caution Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Table of Contents

VJ100M1.7 x 15 VJ300M1.7 x 22 Note) In the case of ZX1VJ114, M, MN and MO cannot be used. 13-2-7 7 Series ZX Ejector Unit Specifications 1 2 ZX1-W07 1 2 ZX1-W10 1 2 Unit no. ZX1-W05 0.5 5 13 Nozzle dia.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

562. + + Note) R1, R2 ports : 1/4 "LN", "MN" type : with 2 sockets.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS 1 4 S mount VV5F3-70 Individual Side Side plate Bottom Valve Top Valve 1 8 1 4 1 4 VF370 VS4 1 4 VV5F3-71 Individual Side Side plate Side Valve Side Valve 1 8 VF3170 (Single solenoid only) 1 4 1 4 1 4 VQ7 Note 1) Supply (P port) is common.