Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, same diameters connection, Pipe-to-Pipe Equal Diameter Connection Type: Union Tees, Applicable Tube Outer Dia. (in) D (D1): 3/8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 3

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, same diameters connection, Pipe-to-Pipe Equal Diameter Connection Type: Union Tees, Applicable Tube Outer Dia. (in) D (D1): 3/8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 3

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/8, Applicable Tube Outer Dia. (in) D2: 1/8, Applicable Tube Outer Dia. (in) D3: 3/8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/8, Applicable Tube Outer Dia. (in) D2: 3/8, Applicable Tube Outer Dia. (in) D3: 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 3/8, Applicable Tube Outer Dia. (in) D2: 1/4, Applicable Tube Outer Dia. (in) D3: 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: Reducing Union Tee, Applicable Tube Outer Dia. (in) D (D1): 1/4, Applicable Tube Outer Dia. (in) D2: 3/8, Applicable Tube Outer Dia. (in) D3: 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material:

Fitting Type: T (Union Tee), Size Combination: 3A-R2 (A: 3/8" x 1/4", B: 1/8" x 0.086", C: 3/8" x 1/4")

Fitting Type: T (Union Tee), Size Combination: 3A-R7 (A: 3/8" x 1/4", B: 1/4" x5/32", C: 1/4" x 5/32")

Fitting Type: T (Union Tee), Size Combination: 3A (3/8" x 1/4"), Piping Type: SR (Space Saving, Run)

Fitting Type: T (Union Tee), Size Combination: 3A-R5 (A: 3/8" x 1/4", B: 3/8" x 1/4", C: 1/4" x 5/32")

Fitting Type: T (Union Tee), Size Combination: 3A-R9 (A: 1/4" x 5/32", B: 3/8" x 1/4", C: 1/4" x5/32")

Fitting Type: T (Union Tee), Size Combination: 3A (3/8" x 1/4"), Piping Type: SB (Space Saving, Branch)

Table of Contents

{Port 3 (R2) is individual and 5 (R1) is common.}

42

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

VQZ1000/2000/3000

R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2 Series VQ7-6 DIN Connector Type 2 position/Single : VQ7-6-FG-S Single (reverse pressure): VQ7-6-YZ-S 50 68.5 52 120.5 68.5 120.5 2-6.5 Mounting hole 50 25 25 42.5 42.5 13 (port A) 13 (port B) 3-Rc3/8 (R1, R2) Manual override R1 R2 P B A 14 50 62 11 9 12 38 50 62 13 A B R1 R2 P 2-Rc1/8 13 34 Indicator

0.4

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1)

VQ7-6/7-8

{Port 3 (R2) is individual and 5 (R1) is common.}

2

/8 02 R1/4 03 R3/8 04 R1/2 Fittings Applicable tubing O.D.