1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

LEC-OM02704CN

-008 (3M()) 54599-1019(Molex) 1674320-1 1596970-1 1596847-1 () LE-CSE-SA ( ) ( ) 2 6 10 () 2 4 8 6 1 0 4 8 L G LE-CSE-RA LG MRR MRR 9 SHD 7 5 MR 3 P5 1 1 5 9 1 3 5 7 9 8 6 LG 4 MRR 2 BAT 3 7 BAT P 5 P5 BAT M R MR LE-CSE-SB . 10 .

LEC-OM02904

-L MR-J3ENCBLM-A1-H HF-MP HF-KP LE-LE-CSE-SB LE-CSE-RB MR-J3ENCBLM-A2-L MR-J3ENCBLM-A2-H HF-MP HF-KP CN2 CN2 36210-0100PL 36310-3200-008 (3M) 54599-1019(Molex) 1674320-1 1596970-1 1596847-1 LE-CSE-SA () () 2 6 10 () 2 4 8 6 10 LG 8 4 LE-CSE-RA LG MRR MRR 9 SHD 7 5 MR 3 P5 1 1 5 9 1 3 5 7 9 8 6 LG 4 MRR 2 BAT P5 3 7 BAT P5 MR BAT MR LE-CSE-SB . 10 .

42

CU1 Note 1) Exhaust cleaner for Rc 1: U side exhaust CU2 Note 1) Exhaust cleaner for Rc 1 1/2: U side exhaust SB Direct exhaust with silencer box: Exhaust from both U and D sides SD Note 1) Direct exhaust with silencer box: D side exhaust SU Note 1) Direct exhaust with silencer box: U side exhaust Stations Cylinder port 03 3/8 04 1/2 B Bottom ported 1/2 CM Mixed 1 1 station 12 12 stations

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

LX

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

VQ5000

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) CD2 Note 1) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

VQ4000

Porting specifications Applicable stations Series 4(A), 2(B) port port location Port size 1(P), 5(R1), 3(R2) 4(A), 2(B) Rc 1/2 C 8, 10, 12 Rc 1/4, 3/8 Side VQ4000 Max. 18 stations Rc 1/4 Bottom Type SA With general type SI unit (Series EX300) Type SB Mitsubishi Electric Corporation MELSECNET/MINI-S3 Data Link System Name of terminal block (LED) Note STATION NO. ADDRESS NO.

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

VQ5000

Junction cover + + 1 3 2 4 Terminal block Marking A side B side 6 mm Connection M3 screw 5 How to Order Manifold T1 03 SD VV5Q 5 1 Option 08 Symbol Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 1 1/2: U side exhaust Series Nil CD1 CD2 CU1 CU2 SB SD SU 5 VQ5000 Note) Note)

CATALOG

2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 1 3/8 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 D I M E N S I O N S S I D E L U G M O U N T I N G T Y P E NC A1S E BORE (INCH) KK A B C DD EA G SS ST MM D EE J SB LF SW SY SU P US WF XS Y ZB TS R 2 150 (1.5) 7/16-20 3/4 1 1/8 3/8 1/4-28 0.3

A

1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 D I M E N S I O N S S I D E L U G M O U N T I N G T Y P E NC A1S E BORE (INCH) KK A B C DD EA G SS ST MM D EE J SB LF SW SY SU P US WF XS Y ZB TS R 2 150 (1.5) 7/16-20 3/4 1 1/8 3/8 1/4-28 0.3 1.26 2.88 5/8 1.1 3.63 0.94 0.94 2.36 3.50 1 1.38 1.71 5.19 2.75 1.43 9/16 3/8 3/8 5/

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

LEC-OM07605CN

1) (1) (1) 46.2 2 SD (1) (1) (1) 46 46.3 SD (1) (1) (1) (1) 46.5 3 DB (1) (1) (1) 46.6 4 DB (1) (1) (1) 47 47.1 SD 47.2 SD 50.1 1 SD (1) (1) (1) 50.2 2 SD (1) (1) (1) 50.3 4 SD (1) (1) (1) 50 1(1) 50.4 1 SD (1) (1) (1) 50.5 2 SD (1) (1) (1) 50.6 4 SD (1) (1) (1) 51.1 3 DB (1) (1) (1) 51 2(1) 51.2 3 DB (1) (1) (1) 8 4 8.

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size CD2 Note 1) 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

VQ7-6/7-8

U side n Silencer box Air release valve coil rating 5 Without With None 100VAC 50Hz/60Hz 200VAC 50Hz/60Hz 24VDC 12VDC Other Nil SB Nil 1 2 3 4 9 4 3 2 1 R side L side 2.