Made to Order

Solid state auto switch : D-H7, D-H7C, D-H7W, D-H7NF, D-H7BA Reed auto switch : D-C7, D-C80, D-C73C, D-C80C, D-A80, D-A9, D-A9V, D-A79W, D-A73 CM2 series C port Stroke A Stroke B A port B port (mm) Bore size (mm) SA SB ZZ 20 48 62 164 25 48 62 168 32 50 64 172 SA + Stroke A SB + Stroke B 40 67.5 88.5 222 ZZ + Stroke (A + B) CM2R series A port B port C port (mm) Bore size (mm) SA SB ZZ 20

1

Series CM2 A port C port B port Stroke Bore size (mm) ZZ SB SA 20 164 62 48 25 168 62 48 32 172 64 50 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SB + Stroke SA + Stroke 40 222 88.5 67.5 ZZ + 2 x Stroke D port Series CG1 GC GD Bore size (mm) W ZZ SB H SA GD GC

LEC-OM02704CN

LE-CSE-SB . 10 .

LEC-OM02904

LE-CSM-SA IP65 2510m LE-HF-MP HF-KP LE-CSM-RA IP65 2510m 11.1.3 LE-CSM-SB IP65 LE-2510m HF-MP HF-KP LE-CSM-RB IP65 2510m 11.1.3 LE-CSB-SA IP65 LE-2510m HF-MP HF-KP LE-CSB-RA IP65 2510m 11.1.4 LE-CSB-SB IP65 2510m LE-HF-MP HF-KP LE-CSB-RB IP65 2510m 11.1.4 11 4 11 LE-CSE-SA IP65 LE-2510m HF-MP HF-KP LE-CSE-RA IP65 2510m 11.1.2(1) LE-CSE-SB IP65 2510m

42

How to Order Manifold VV5Q Series 4 C8 F U1 1 08 CE-compliant Nil Q CE-compliant 4 VQ4000 Option Manifold Thread type Symbol Option Nil None CD Note 2) Exhaust cleaner: For D side mounting CU Note 2) Exhaust cleaner: For U side mounting K Note 3) Special wiring specifications (Except double wiring) N Name plate (T kit only) SB Direct exhaust with silencer box: Exhaust from both sides (F/

Series VQ Base Mounted Metal Seal/Rubber Seal

Item Specifications 24V DC, +10%, 5% External power supply Current consumption (Internal unit) SA, SB, SD, SE, SF, SG, SJ, SK, SQ, SR: 0.1A SC: 0.3A How to Order Manifold VV5Q 08 C6 12 D XP A S Dust proof styel (-XP)(VQ1000 only) Suffix -XP for the dust proof SI unit. (Except for SE, SG and SQ.)

Electric Actuators

distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 50 50 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 100 100 1.2 1.1 0.7 0.6 0.3 0.2 0.1 0.1 Refer to page 302 for acceleration time. 215 Direct Acting Guide 5 Phase Stepper Motor Low Profile Slide Table Type Slide Screw Series LXF Without Motor Brake 8mm/12mm lead How to Order 1 S F9N Stroke LXFH5 SB

LX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LXF Without Motor Brake 8mm/12mm lead How to Order 1 S F9N Stroke LXFH5 SB Auto switch types Wiring/Output type Lead wire length (m) Contact Symbol Model Without auto switch Nil F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL Home position switch

VQ4000

No. of stations occupied, 2 stations Item Specifications 24 VDC +10%, 5% External power supply Current consumption SA, SB, SBB, SD, SF, SH, SJ, SK, SQ, SR, SV: 0.1A (Internal unit) SC: 0.3A For details on specifications and handling, refer to the separate technical instruction manual.

VQ5000

Special wiring specifications (except double wiring) Name plate (available only for T kit) N SB Note 3) L Direct exhaust with silencer box: D and U side exhausts 1 to 12 2.

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, same diameters connection, Pipe-to-Pipe Equal Diameter Connection Type: Union Tees, Applicable Tube Outer Dia. (in) D (D1): 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 5

Fitting Type: T (Tee Union), Size Combination: 5A (3/4" x 5/8")

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Low Profile Slide Table Type Slide Screw Series LXF Without Motor Brake 8mm/12mm lead How to Order Auto switch types 1 S F9N Stroke LXFH5 SB Wiring/Output type Lead wire length (m) Contact Symbol Model Without auto switch Nil F9N F9P F9G F9H F9GL F9HL

VQ5000

Porting specifications Applicable stations Series 4(A), 2(B) port location Port size 1(P), 5(R1), 3(R2) 4(A), 2(B) Side Rc 3/4 Rc 3/8 Rc 1/2 Rc 1/2 VQ5000 Max. 9 stations Bottom Type SA With general type SI unit (Series EX300) Type SB Mitsubishi Electric Corporation MELSECNET/MINI-S3 Data Link System Name of terminal block (LED) Note STATION NO. ADDRESS NO.

Rotary Actuator

AU MU CRQ2 MSQ MSZ B CRQ2X MSQX SOL.1 Rc1/4 (Port size) (Opposite side) D (g6) DD (h9) MRQ W K b SC F H l U VJ 35 44.5 SE SD BA 37 76 107 S VL SB 49 (Max.) BA VH VK A C Drawing shows the appearance for rotation of 90 and 100. * ( ) are the dimensions for rotation of 180 and 190. Drawing shows that SOL.1 is in the de-energized state.

Table of Contents

49 57 74 82 6.5 8.5 11.5 12 47.5 57.5 73 87 60 70 90 100 8 8 6 6 33 12 46 13 17 22 22 3.5 4.5 5.5 5.5 46.7 67.3 73.2 73.2 15 15 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 4.5 2.5 MY1B25 MY1B32 MY1B40 16 22 22 74 74 56 57 43 6 4 57 8-11-26 26 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2-G 2-H F E MX C D A B MTS Side support B MY-SB

A

/4 1 3/8 325 (3.25) 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 1 3/8 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 D I M E N S I O N S S I D E L U G M O U N T I N G T Y P E NC A1S E BORE (INCH) KK A B C DD EA G SS ST MM D EE J SB

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Special wiring specifications (other than double wiring) Name plate (T kit only) Direct exhaust with silencer box: Both D and U side exhausts Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure (except F and T1 kits) Symbol Series Nil CD1 CD2 CU1 CU2 K N SB

LEC-OM07605CN

IP65 2510m LE-T10) LE-CSM-RB IP65 2510m 11) LE-CSB-SA IP65 2510m LE-T12) LE-CSB-RA IP65 2510m 13) LE-CSB-SB IP65 2510m LE-T14) LE-CSB-RB IP65 2510m 15) LE-CSE-SA IP65 2510m LE-T16) LE-CSE-RA IP65 2510m 17) LE-CSE-SB IP65 2510m LE-T18) LE-CSE-RB IP65 2510m 11 5 11. 11.1.2 STO CN8 LEC-MR-D05UDL3M 3m CN8 (1) LEC-MR-D05UDL3M MR-D05UDL3M-B CN8 (2) CN8

Vacuum

Flat wlth rib Deep type Deep type uimensions I lPfi $mie WfiBull Pad Diameters a6 . sB Pad Diameters s20. s25. a32 Bellows type itp!199!!9 tuE!!.