Fitting Type: U (Straight Union), Size Combination: 31 (10mm x 8mm)

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during

Fitting Type: U (Union), Size Combination: 31-R2 (A: 10mm x 8mm, B: 6mm x 4mm, C: 10mm x 8mm)

Fitting Type: Union, Size Combination: A: 10mm x 8mm, B: 6mm x 4mm, C: 10mm x 8mm, Packaging: -

Table of Contents

(A) 4 (B) 2 FPG 1 (P) 5 (R1) 3 (R2) Coil rated (A) 4 (B) 2 1 2 3 4 9 100 VAC 200 VAC 24 VDC 12 VDC FIG 1 (P) 5 (R1) 3 (R2) Other voltages Option For other voltages, please contact SMC separately.

42

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P)

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

VQZ1000/2000/3000

(B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

0.4

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

VQ7-6/7-8

(P) 5 (R1) 3 (R2) (A) 4 (B) 2 YZ Sub plate port size 1 5 (R1) (P 3 ) (R2) Without sub plate Side port Rc3/8 Side port Rc1/2 Side port Rc3/4 Bottom port Rc3/8 Bottom port Rc1/2 Bottom port Rc3/4 Nil A03 A04 A06 B03 B04 B06 (A) 4 (B) 2 FHG 1 (P) 5 (R1) 3 ) (R2) (A) 4 (B) 2 FJG 1 (P) 5 (R1) 3 (R2) Seal type Nil R Metal seal Rubber seal (A) 4 (B) 2 FPG 1 (P) 5 (R1) 3 (R2) Options (A) 4 (B)

VQ7-6/7-8

(A) 4 (B) 2 FPG 1 (P) 5 (R1) 3 (R2) Coil rated (A) 4 (B) 2 1 2 3 4 9 100 VAC 200 VAC 24 VDC 12 VDC FIG 1 (P) 5 (R1) 3 (R2) Other voltages Option For other voltages, please contact SMC separately.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

VQ5000

(A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5451 VQ5450 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5551 (A) 4 (B) 2 VQ5550 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3 Description Material Note No. 1 2 3 Body Spool/Sleeve Piston Body Spool valve Piston Die cast aluminum Stainless steel Resin

1

actuation VM 2-position single 4-position dual 3-port valve (A) 4(A) 2(B) 2(B) (A)4 XT34 Note) A 1 (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

VFS

Port Specifications Porting specifications: Rc (Connecting port size) Passage Symbol Valve 4(A), 2(B) Base 5(R1), 3(R2) Base 1(P) Side/Rc 1/8 5(R1), 3(R2) Common 1(P) Common 1 Top/Rc 1/8 Side/Rc 1/8 Option Blanking plate VVFS1000-10A-1 With gasket, screw Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

SYJ3000/5000/7000

SYJ7000: 8 mm JIS Symbol 2 position double 2 position single 3 position closed center 3 position exhaust center 3 position pressure center Body ported (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1-5-72 73 Series SYJ5000/7000 Made to Order Specifications: DIN Terminal

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Flow Control Equipment Pressure Switches/ Pressure Sensors 3(R2) 1 (P) (R1)5 3 position pressure center i 2(B) (A)4 5 (R1) 1 (P) 3 (R2) 3(R2) 1 (P) (R1)5 (This figure shows a closed center type.)

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)