Table of Contents

With indicator Tubing size Symbol 2 3 4 5 Body class 2 3 4 5 Orifice dia. 4 8 12 20 Valve type Symbol S03 S04 S05 S06 S07 S06 S07 S08 S10 S11 S10 S11 S12 S13 S12 S13 S19 Tubing size 1/8" Body class 0 1 2 N.C.

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ9.52, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 8, Option:

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8)

ZP

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

ZP

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

ZP

Note 3) in the table indicates the vacuum inlet.

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ9.52, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 8, Option:

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ9.52, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 8, Option:

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 4 (Indicator)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE-LVC40,50), Option: 2 (By-pass)

Body Class: Orifice Diameter ø8, Valve Type: Normally Closed, Applicable Tube OD: 3/8, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Indicator, Specification: -, Z: -

Body Class: Orifice Diameter ø8, Valve Type: Normally Closed, Applicable Tube OD: 3/8, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE-LVC40,50, Option: By-pass, Specification: -, Z: -

Series KP/KPQ/KPG

8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30 8 PPS LVA40 12 SUS316 LVA50 20 Integral fitting type/Series LVC (basic type) Series LVC p: Body material SUS316 only Tubing size Metric sizes Inch sizes 4 6 8 10 12 19 1/8 3/16 1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination

Series KP/KPQ/KPG

8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30 8 PPS LVA40 12 SUS316 LVA50 20 Integral fitting type/Series LVC (basic type) Series LVC p: Body material SUS316 only Tubing size Metric sizes Inch sizes 4 6 8 10 12 19 1/8 3/16 1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination

KP/KPQ/KPG

8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30 8 PPS LVA40 12 SUS316 LVA50 20 Integral fitting type/Series LVC (basic type) Series LVC : Body material SUS316 only Tubing size Metric sizes Inch sizes 4 6 8 10 12 19 1/8 3/16 1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Class2 Class3 Class4 Class5 LVD20 LVD30 LVC40 LVD40 LVD50 LVC30 LVC20 LVC50 A 54.5 79.5 82 105.5 54.5 79 96 129 Integral tubing (construction) B 67 83 93 114 79 106 131 154 17-5-43 3 Integral Fitting Type (Hyper Fittings) Series LVD How to Order VC LVD 1 0 03 S VDW Body class Option VQ Symbol 1 2 3 4 5 Nil 1 2 3 Orifice dia. 2 4 8 10 16 Body class 1 2 3 4 5 None With flow rate adjustment

Air/Manually Operated High Purity Chemical Valve Series LV

/N.O. with same configuration/Double acting Compatible with 100C fluid temperature 1.12-4 Integral Fitting Type Series LVC Air Operated P.1 to P.6 LVC20/23 4 4, 6 1/8, 1/4, 3/16 LVC30 8 6, 8, 10 1/4, 3/8 LVC40 10 10, 12 3/8, 1/2 LVC50 16 12, 19 1/2, 3/4 Model Orifice diameter Millimeter Tube outside dia. Inch Symbol Type Basic type Valve type N.C. PB PA PA N.O. B A B A B A PB N.C.