Table of Contents

V 230 V 24 V 12 V 02 ( ) 1 4 02 ( ) 03 ( ) 04 ( ) 02 ( ) 03 ( ) 04 ( ) Port no.

Vacuum

The value ot the effective cross-sectional area should be greater than the value which is found by the formula below: at g -nax V : volume of piping from valve to pad (4: l V = " x d 2 x ' 4 1000 d : inside diameter of tubing (mm), L : tubing length (meters, m), 2.

Vacuum

The value ot the effective cross-sectional area should be greater than the value which is found by the formula below: at g -nax V : volume of piping from valve to pad (4: l V = " x d 2 x ' 4 1000 d : inside diameter of tubing (mm), L : tubing length (meters, m), 2.

LVQ

) S Model LVQ20S-S07-4 LVQ30S-S11-4 LVQ40S-S13-4 LVQ50S-S19-4 LVQ60S-S25-4 S 70.5 88.5 94 A B SMC 134.5 144 17-5-79 18 Series LVQ Dimensions Basic type N.O. valve Q LQ1 integral fitting 1/8 (3), (4) E R Pilot port Pilot port Rc 1/8 (NPT 1/8) Sensor (breathing) port Rc 1/8 (NPT 1/8) Breathing port Rc 1/8 (NPT 1/8) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

ZP

Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 15 (Hexagon) 3.5 4 5.5 5 4 4 1.5 1.5 4.1 0.8 10.1 1.6 10.9 2.1 Applicable pad part no. Applicable pad part no. ZP2-04S ZP2-15S ZP2A-S12 Adapter part no. M5 x 0.8 Width across flat 7 (Hexagon) 4 7 4 1.5 1.5 3.1 Applicable pad part no. 3.9 ZP2-06S ZP2A-S13 Adapter part no.

ZP

Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 15 (Hexagon) 3.5 4 5.5 5 4 4 1.5 1.5 4.1 0.8 10.1 1.6 10.9 2.1 Applicable pad part no. Applicable pad part no. ZP2-04S ZP2-15S ZP2A-S12 Adapter part no. M5 x 0.8 Width across flat 7 (Hexagon) 4 7 4 1.5 1.5 3.1 Applicable pad part no. 3.9 ZP2-06S ZP2A-S13 Adapter part no.

ZP

Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 15 (Hexagon) 3.5 4 5.5 5 4 4 1.5 1.5 4.1 0.8 10.1 1.6 10.9 2.1 Applicable pad part no. Applicable pad part no. ZP2-04S ZP2-15S ZP2A-S12 Adapter part no. M5 x 0.8 Width across flat 7 (Hexagon) 4 7 4 1.5 1.5 3.1 Applicable pad part no. 3.9 ZP2-06S ZP2A-S13 Adapter part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

Air/Manually Operated High Purity Chemical Valve Series LV

/N.O. with same configuration/Double acting Compatible with 100C fluid temperature 1.12-4 Integral Fitting Type Series LVC Air Operated P.1 to P.6 LVC20/23 4 4, 6 1/8, 1/4, 3/16 LVC30 8 6, 8, 10 1/4, 3/8 LVC40 10 10, 12 3/8, 1/2 LVC50 16 12, 19 1/2, 3/4 Model Orifice diameter Millimeter Tube outside dia. Inch Symbol Type Basic type Valve type N.C. PB PA PA N.O. B A B A B A PB N.C.

Body Class: 4 (Orifice Diameter ø10), Valve Type: 0 (Normally Closed), Applicable Tube OD: 13 (1/2), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 4 (Indicator)

Body Class: Orifice Diameter ø10, Valve Type: Normally Closed, Applicable Tube OD: 1/2, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Indicator, Specification: -, Z: -

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ12.7, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 10, Option

Body Class: 4 (Orifice Diameter ø10), Valve Type: 0 (Normally Closed), Applicable Tube OD: 13 (1/2)

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ12.7, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 10, Option

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ12.7, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 10, Option

Body Class: 4 (Orifice Diameter ø10), Valve Type: 0 (Normally Closed), Applicable Tube OD: 13 (1/2), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 3 (Flow Rate Adjustment & By-pass)

Body Class: 4 (Orifice Diameter ø10), Valve Type: 0 (Normally Closed), Applicable Tube OD: 13 (1/2), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 4 (Orifice Diameter ø10), Valve Type: 0 (Normally Closed), Applicable Tube OD: 13 (1/2), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: 4 (Indicator)

Body Class: Orifice Diameter ø10, Valve Type: Normally Closed, Applicable Tube OD: 1/2, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE, Option: Indicator, Specification: -, Z: -