Body Class: Orifice ø16, Valve Type: Normally Closed, Tube Size: ø19, 3/4", Pilot Port: Body Class 3, 4, 5 - NPT 1/8", Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment

Body Class: 5 (Orifice ø16), Valve Type: 0 (Normally Closed), Tube Size: S19 (ø19, 3/4"), Pilot Port: N (Body Class 3, 4, 5 - NPT 1/8"), Material: F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE)

Body Class: 5 (Orifice ø16), Valve Type: 0 (Normally Closed), Tube Size: S19 (ø19, 3/4"), Pilot Port: N (Body Class 3, 4, 5 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

High purity chemical valves, series LVC with integral fittings eliminate the possibility of residual liquid in pipe threads. In addition, the body has been designed for smooth flow with minimal internal dead space. Special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of

Prevents Micro-Bubbles

type for manifold Nil PFA 3 8 Hydrofluoric acid compatible (Only LVC40, 50 type) PTFE F PVDF PFA 10 3/8" Ammonium hydroxide compatible 10 3/8" PTFE N PPS PFA 4 12 1/2" Pilot port thread type Symbol Thread type M5 Rc 1/8 NP T1/8 Body class 2 3/4/5 3/4/5 12 1/2" 5 Nil 19, 3/4" N 17-5-13 11 Series LVC Manifold variations How to Order Manifold Assembly (Example) Model LVC20A LVC30A LVC40A LVC50A

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type for manifold Nil PFA 3 8 Hydrofluoric acid compatible (Only LVC40, 50 type) PTFE F PVDF PFA 10 3/8" Ammonium hydroxide compatible 10 3/8" PTFE N PPS PFA 4 12 1/2" Pilot port thread type Symbol Thread type M5 Rc 1/8 NP T1/8 Body class 2 3/4/5 3/4/5 12 1/2" 5 Nil 19, 3/4" N 17-5-13 11 Series LVC Manifold variations How to Order Manifold Assembly (Example) Model LVC20A LVC30A LVC40A LVC50A

ZP

/N6/U4/U6)-(A5/A6) ZPYm-(N4/N6/U4/U6)-(B4/B5) r Component Parts No.

MB

90 (n4) 2 110 + 55 (n4) 2 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 90 + 55 130 + 55 95 + 55 n = 4, 8, 12, 16 n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 90 110 115 120 95 130 140 120 125 130 2 (Different sides or Same side) 105 100 (n4) 2 120 + 55 (n4) 2 (n4) 2 125 + 55 (n4) 2 130 + 55 (n4) 2 (n4) 2 105 + 55 n = 4, 8, 12, 16 100

Air Cylinder Series MB

) 2 80 + 55 (n4) 2 105 + 55 (n4) 2 110 + 55 (n4) 2 115 + 55 (n4) 2 (n4) 2 60 + 55 n = 4,8,12,16... 115 + 55 n (same side) n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... 110 85 115 120 2 (different side or same side) 120 70 60 (n4) 2 85 + 55 (n4) 2 (n4) 2 110 + 55 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 60 + 55 120 + 55 70 + 55 n (same side) D-A59W

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

weight 90 100 110 120 20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, 20+55 n=2, 4, 6, 8, 90+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 D-A59W n (Same side) 1.16 (1.21) 1.79 (1.84) 2.79 (2.83) 4.88 (5.03) 7.17 (7.38) Double clevis 90 100 110 120 15 1 2 (Dif. / same side(s)),

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Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft

ZP

Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft

ZP

Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft

•

20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...) oe.4 1 5.5 7 2.5 ZJri'Otl 8 ,1\ ZPY32~ 32 35 14.5 Deep type I r.sXI 1., . "" , 1: t.i5 XQ! 'I U4!"'

CATALOG

-KM8 (VVQ2000) S I L E N C E R (EXH P O R T) KQPB L A N K I N G P L U G P R PR VVQ2000-N4 station (1-Max. station.)

V

-KM8 (VVQ2000) S I L E N C E R (EXH P O R T) KQPB L A N K I N G P L U G P R PR VVQ2000-N4 station (1-Max. station.)

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VVQ1000-N4-Station (1 to Max. stations) Name plate [-N4] AN103-X233 Silencer (For EXH port)

Series VQ Metal Seal/Rubber Seal Body Ported

For SUP passage block VQ0 4 ---P 1 2 0 1 VQ0 4 ---R 1 2 0 1 VQ0 4 ---PR 1 2 0 1 For EXH passage block For SUP/EXH passage block Name plate [-N4] VVQ0-N4-Station (1 to Max. stations) When ordering assemblies incorporated with a manifold, suffix N to the manifold No. It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n4

PSE530/200

the set value Decreases the set value Switch output 1 & 2 CH 1 2 3 4 For normally closed PRESSURE OFF IF SET P1 P2 P3 P4 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Data SET (For CH1) Hysteresis Hysteresis OUT2 setting (1)/CH1 only Manual mode ON Switch output 1 & 2 For normally open Displays alternately MPa OFF kPa n1 n2 n3 n4