Body Class: 3 (Class 3, Orifice ø8), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 11 (3/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)

Body Class: 3 (Class 3, Orifice ø8), Fitting Type: G (w/Metal Gasket Seal Fittings), Applicable Tube Size: 11 (3/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)

Body Class: Class 3, Orifice ø8, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option: -

Body Class: Class 3, Orifice ø8, Fitting Type: w/Metal Gasket Seal Fittings, Applicable Tube Size: 3/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option: -

212

(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator for Chemical Liquids Material and Fluid Compatibility Check List Chemical Compatibility Acetone Note 1, 2) Ammonium hydroxide Note 2) Isobutyl alcohol Note 1, 2) Isopropyl alcohol Note 1, 2) Hydrochloric acid Note

Body Class: 3 (Class 3, Orifice ø8), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 11 (3/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE), Option: E (Body Wetted Parts Equivalent to EP Grade)

Body Class: Class 3, Orifice ø8, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option: Body Wetted Parts Equivalent to EP Grade

Body Class: 3 (Class 3, Orifice ø8), Valve Type: 0 (Normally Closed), Fitting Type: T (Integrated Tubing), Applicable Tube Size: 11 (3/8), Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE), Option 1: None, Option 2: E (Body Wetted Parts Equivalent to EP Grade)

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: Integrated Tubing, Applicable Tube Size: 3/8, Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: None, Option 2: Body Wetted Parts Equivalent to EP Grade

Clean Room Regulator/Fluoro Resin Type Series SRF30

New PFA Body 1 PVDF Valve guide 2 PPS Bonnet 3 PVDF Spacer 4 FPM Pilot diaphragm 5 PP Diaphragm support 6 FPM Withstand pressure diaphragm B 7 With plug-in reducer PTFE Diaphragm 8 PTFE Valve diaphragm 9 FPM Withstand pressure diaphragm A 10 SUS304 Fluoro resin coating Spring holder 11 SUS304 Fluoro resin coating Valve spring 12 New PFA Fitting 13 3 Series SRF30 Dimensions Tubing/SRF30-T11

This is a legacy product. Please contact us for the latest version.sales@ocaire.com FLUOROPOLYMER VALVES & REG. VALVE. VALVE. FLUOROPOLYMER. 2I.

EXxx-OMN0037CN

V420 mA AD (ab) AD (0b) [V] [mA] 16 10 [V] [mA] 16 10 15 V 420 mA 010 V 05 V 020 mA 07FF 2047 5.25 21 07FF 2047 10.5 5.25 21 078E 1934 5 20 079E 1950 10 5 20 0400 1024 3 12 0400 1024 5.25 2.625 10.5 0072 114 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB

EXxx-OMQ0015CN

AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 4095 5.25 21 4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047 10.5 5.25

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com NB 3 AD AE AA 3-3.2, counterbore dia. SB, counterbore depth 4 (See section SD-SD) P.C.D.R (Mounting hole) (Counterbore depth 4) (Counterbore dia.

Clean Gas Filter

SFD LLB Model AD GD Model Element part no.

Clean Air Module

AME AMF ZFC SF SFD LLB LLB AD GD 349

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 -52No.EX-OMS0026CN AD -3276732767 = 15 V 15 V 5000 1000 10001 V 20002 V 30003 V 40004 V 50005 V (5 V-1 V)(5000-1000)1/1000 15 V 1/1000 AD 1000 5000 (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -3276632767 10 5 5 20 20 -3276732766 0 1 0 0 4 /(E.O./W.S.) () E.O.

Fieldbus system Ethernet POWERLINK compatible SI unit

Value x 0.01 (mA or V) Value (-32767.. 32767 ) Lower limit AD value of Analog Range. 7 Lower Limit Value*1 When analog data format is linear scaled: Set the scaled upper limit AD value. 0 *1: Set value shall be set per analog output range within settable range in the table below.

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108 55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25