Body Class: 6 (Class 6, Orifice ø22), Fitting Type: G (w/Metal Gasket Seal Fittings), Applicable Tube Size: 25 (1), Material: ND (Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE)

Body Class: Class 6, Orifice ø22, Fitting Type: w/Metal Gasket Seal Fittings, Applicable Tube Size: 1, Material: Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE, Option: -

Body Class: 6 (Class 6, Orifice ø22), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 25 (1), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)

Body Class: 6 (Class 6, Orifice ø22), Fitting Type: T (Integrated Tubing), Applicable Tube Size: 25 (1), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)

Body Class: Class 6, Orifice ø22, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 1, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option: -

Body Class: Class 6, Orifice ø22, Fitting Type: Integrated Tubing, Applicable Tube Size: 1, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option: -

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

G55 G25 G55 G25 G55 N-12.5-1.5 G35 G65 G35 G65 Chromium molybdenum steel Steel wire Rolled steel Rolled steel Rolled steel Rolled steel Rolled steel Rolled steel Non-lube Seals except #0 and #1 are the same as lube type.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Z With rod boot ZZ CD-G02 CD-G25 CD-G03 B TT TV TW TX TY TZ Z CD CX CZ L RR V TE TF TH ZZ 159 + l 25 30 35 29 33 40 14 16 20 11 13 15 38 45.5 54 8 10 12 10 10 10 5.5 5.5 6.6 42 42 48 16 20 22 3.2 3.2 4.5 35.8 28 28 28 43.4 20 25 32 118 125 131 150 (159) 139 146 155 Up to 200 Up to 300 Up to 300 138 + l 168 + l 39.8 48 147 + l 177 + l 49.4 59.4 153 + l 198 + l 178 (187) 170

CS1

9 @0 @1 @2 #2 Piston rod Rod seal Carbon steel Hard chrome plated P36 @5 @6 @7 @8 @9 P36 P70 P40 P45 P50A P60 Holder plate Piston seal Cast iron Black coating P115 P130 P285 P150 P165 P185 P235 NBR Bushing Valve seal Lead bronze casting P7 P7 P7 P7 P7 P7 P7 Valve guide Tube gasket Brass C120 C135 C155 C175 C195 CS160-1618-G4 CS160-1618-G5 Tie rod Piston seal Carbon steel Chromated G25 G25

Air Cylinder

Applicable bore size (mm) Dd9 L1 d L2 m t Included retaining ring CD-G02 20 8 0.040 0.076 43.4 7.6 38.6 1.5 0.9 Type C8 for axis CD-G25 25 10 0.040 0.076 48 9.6 42.6 1.55 1.15 Type C10 for axis CD-G03 32 12 0.050 0.093 59.4 11.5 54 1.55 1.15 Type C12 for axis CD-G04 40 14 0.050 0.093 71.4 13.4 65 2.05 1.15 Type C14 for axis CD-G05 50 16 0.050 0.093 86 15.2 79.6 2.05 1.15 Type C16 for axis

51

NA P ZZ Z RR S TE TF TH TT TV TW TX TY TZ CA2 20 25 32 40 50 63 112 120 129 141 176 186 91 99 105 113 144 149 Up to 200 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 24 29 35.5 44 55 69 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 11 13 15 18 20 22 57 60 62 62 84 84 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 3.2 3.2 4.5 4.5 6 8 (35.8) (39.8) (49.4) (58.4) (72.4) (90.4) 42 42 48 56

Smooth Cylinder/Low Speed Cylinder

ZZ Z TZ 20 25 32 40 50 63 80 100 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 IY-G08 IY-G10 137 146 154 177 205 212 246 258 126 133 139 159 185 190 228 236 43.4 48 59.4 71.4 86 105.4 64 72 TZ CZ RR L V 80, 100 CD hole H10 Axis d9 Note) Refer to page 1209 for pivot bracket. Other dimensions are the same as basic style.

CL

Applicable bore size (mm) B C D d H Dd9 L d Part no. 0.040 0.076 0.040 0.076 0.050 0.093 14 0.050 0.093 0.040 0.076 0.040 0.076 0.040 0.076 CD-G02 CD-G25 CD-G03 CD-G04 NT-02 NT-03 NT-G04 20 25 32 40 20 25, 32 40 21 25.6 41.6 7.6 9.6 9.6 IY-G02 IY-G03 IY-G04 M8 x 1.25 5 6 8 20 25, 32 40 13 17 19 15.0 19.6 21.9 12.5 16.5 18 8 10 12 8 10 10 43.4 48 59.4 71.4 7.6 9.6 11.5 13.4 M10 x 1.25 M14

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

CL

Applicable bore size (mm) B C D d H Dd9 L d Part no. 0.040 0.076 0.040 0.076 0.050 0.093 14 0.050 0.093 0.040 0.076 0.040 0.076 0.040 0.076 CD-G02 CD-G25 CD-G03 CD-G04 NT-02 NT-03 NT-G04 20 25 32 40 20 25, 32 40 21 25.6 41.6 7.6 9.6 9.6 IY-G02 IY-G03 IY-G04 M8 x 1.25 5 6 8 20 25, 32 40 13 17 19 15.0 19.6 21.9 12.5 16.5 18 8 10 12 8 10 10 43.4 48 59.4 71.4 7.6 9.6 11.5 13.4 M10 x 1.25 M14

5

Bore size (mm) TZ Z ZZ Applicable pin part no. 20 43.4 126 137 CD-G02 25 48 133 146 CD-G25 32 59.4 139 154 CD-G03 40 71.4 159 177 CD-G04 50 86 185 205 CD-G05 63 105.4 190 212 CD-G06 80 64 228 246 IY-G08 100 72 236 258 IY-G10 80, 100 TZ CZ RR L V CD hole H10 Axis d9 Note) * Refer to page 178 for pivot bracket. * Other dimensions are the same as basic type. * Refer to the basic type for the

CG1

L Dd9 t m d l 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 C-8 type for pivot 0.9 1.15 1.15 1.15 1.15 1.35 38.6 42.6 54 65 79.6 97.8 43.4 48 59.4 71.4 86 105.4 1.5 1.55 1.55 2.05 2.05 2.45 7.6 9.6 11.5 13.4 15.2 17 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 20 25 32 40 50 63 8 10 12 14 16 18 (mm) C-10 type for pivot Bore size (mm) TN Part No.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

•

Type F Y 12 1.7 ZPlOCQ Cl0 10 12 4 13 7.7 > 8 13 . 15, 4 13 7.7 16 18 4 13 8,2 2d 23 4 15 9,5 ZP13CQ C-'3 12 1.8 12.5 1.2 14 1.7 ZP16CQ C16 ZP20CQ G20 ZPlOUO 50UO 00 ZP25CQ G25 25 28 4 15 9.5 14 1.8 32 I 35 4 15 10 ZP32CQ = ZP40CQ C40 .14.5 2.3 40 I 43 7 18 13.7 50 153 7 18 14,7 18.5 3.3 ZPSOCQ G50 Deep type pad -~~ ZPlODO 4000 t" ~F=m-' I S (mm) Part No. r"~ IA 18 IG 10 E U02 2 _2.6 1.2