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0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

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SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

Symbol: 09R2 (N.O., Port 3 IN, Port 2 Out), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KZ (Plug Connector, 300mm)

Symbol: N.O., Port 3 IN, Port 2 Out, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: 09R2 (N.O., Port 3 IN, Port 2 Out), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: N.O., Port 3 IN, Port 2 Out, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant

VZS

-01 3 position closed center: VZS2350-KZ-01 3 position exhaust center: VZS2450-KZ-01 3 position pressure center: VZS2550-KZ-01 EVS VFN 132 (3 position: 142) (Lead wire length) 300 (Lead wire length) 147 (3 position: 157.5) 300 With light/surge voltage suppressor Other dimensions are the same as the grommet type.

Table of Contents

Threaded type from 6A to 50A is standardized.

SY

For SY5000 [SY5000-6A-01] [SY5000-6A-C6] Description No. Note Material Die-cast aluminum (SY3000 is die-cast zinc.)

2/3 Port Valve

/30m Steel tube, full pressure/0.97MPa VNC1(N.C. 0.49MPa) VNC4(N.C. 0.97MPa) How to Calculate Flow Speed v=212 X Q/d2 (Symbol) v: Flow speed(m/s) Q: Flow rate(l/min) d: Piping bore size(mm) 4.2-22 VNC Port size: 6A, 8A, 10A Thread connection VX VN VQ Port size Rc(PT) Model 1 8 1 4 3 8 VNC1-6A VNC1-8A VNC1-10A EZ, TZ, DZ: 9mm longer 4.2-23 VNC Port size: 10A, 15A, 20A, 25A Thread connection

Air Slide Table

MXQ 6A-2 With end lock (6) Q Dimensions [mm] 5 J Model J Q MXQ6A-10Z2 57.5 25 MXQ6A-20Z2 MXQ6A-30Z2 78.5 5.5 Pilot port 2 x M5 x 0.8 7.5 33 MXQ6A-40Z2 90.5 MXQ6A-50Z2 100.5 0.5 3 3 34 8.5 5 3 23 MXQ6A-10Z2 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) 5 J * Dimensions other than those listed above are the same as those for the standard type. 5.5 MXQ 6A-2 With end lock, extension stroke

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

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VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

2/3 Port Valve

Refer to table q for configuration.