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There were no hits with the full part number, but there were 2 hits in the keyword search.

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Table of Contents

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

SY

(See the entry example below.) 1 Quantity 2 3 4 5 6 7 8 Stations or layout Single solenoid 2 position Double solenoid Refer to the entry example.

Air Slide Table

MXQ 6A-2 With end lock (6) Q Dimensions [mm] 5 J Model J Q MXQ6A-10Z2 57.5 25 MXQ6A-20Z2 MXQ6A-30Z2 78.5 5.5 Pilot port 2 x M5 x 0.8 7.5 33 MXQ6A-40Z2 90.5 MXQ6A-50Z2 100.5 0.5 3 3 34 8.5 5 3 23 MXQ6A-10Z2 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) 5 J * Dimensions other than those listed above are the same as those for the standard type. 5.5 MXQ 6A-2 With end lock, extension stroke

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

Table of Contents

VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement

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VQ 4 0 1 0 5 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant 1 2-position single 2 2-position double 3 3-position closed center 4 3-position exhaust center 5 3-position pressure center 6 3-position double check VV5Q41-07C8T0(-Q)1 setManifold base part no. *VQ4100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ4200-51(-Q)2 setsValve part no.

SQ1000/2000

COM COM 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM 25 26 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM T kit Terminal block (SQ2000 only) J kit Flat ribbon cable connector

Vacuum System Peripherals:

q Number of ejector/valve stations Alignment (for special specifications) 8 0 9 1 10 2 11 3 U side D side 12 4 13 5 14 6 15 7 24V DC 13-14-24 24 e Valve Model Fill in the blanks below with symbols of necessary specifications.

2/3 Port Valve

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

Compact 5-Port Solenoid Valve

5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9 () () Station 5 Station 5 COM. (+) 10 (+) (+) (+) (+) (+) (+) (+) (+) Positive common Negative common Station 6 Station 6 Station 7 Station 7 Station 8 Station 8 * When using a valve with no polarity

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

VDW

VXA 8 15 5 VN M5,1/8 1 (IN) port M5,1/8 2 (N.C.) port 8.5 (6.3) LVC 6 12.8 LVA 1/8, 1/4 1/8, 1/4 2-M3 x 0.5 thread depth 5 1 (IN) port Dimensions inside ( ) are for port size 1/8. 2 (N.C.) port LVH LVD LVQ 2-M4 x 0.7 Thread depth 6 LQ LVN Bracket assembly part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Applicable solenoid valves: Series 10-SY3 0, 10-SY5 0, 10-SY7 0, 10-SY9 0 2 4 6 2 4 6 2 4 6 2 4 20 40 45 60 3 5 7 9 X90 10 SY Model no. Entry is the same as standard products. Specifications and performance are the same as standard products.