TABLE OF CONTENTS

COIL NO. 6 7.8 8.5 12 14 5.4 7 7.7 11 13 3 3.8 4.4 6 7 5C-103-A24 5C-104-A24 5C-105-A24 5C-106-A24 5C-107-A24 5C-3-K24 5C-4-K24 5C-5-K24 5C-6-K24 5C-7-K24 18.5 24 32 39 45 17 22 29 35 41 9 12 16 20 23 5C-108-A24 5C-109-A24 5C-110A24 5C-111-A24 5C-112-A24 5C-8-K24 5C-9-K24 5C-10-K24 5C-11-K24 5C-12-K24 48 54 94 120 153 43 48 85 110 138 24 28 47 60 76 5C-113-A24 5C-114-A24 5C-115-A24 5C-116

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Pump 1.1 kW Compressor + Fan + Others 4 kW (For air-cooled type) (For air-cooled type) Fan Pump Fan Pump HRZ 3. Inverter pump Triple inverter 3.

HRS100/150

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC Note 4) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Proposals for Energy Saving

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Construction Auxiliary Pneumatic Equipment Air Preparation Equipment i q u !3 !1 r t y !2 e !4 !5 !4 !5 !

Lightweight and Compact

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

Thermo-chiller

Laser output power 3 [kW], conversion efficiency 30% The oscillators power consumption is, 3 [kW] 0.3 = 10 [kW] The cooling capacity required for the oscillator is, 10 [kW] 3 [kW] = 7 [kW] Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] W Efficiency Q = P = In this example, using an efficiency of 0.7: 5.1 0.7 = = 7.3 [kW] Q: Heat generation amount Cooling capacity = Considering

energy saving effect

phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability

Thermo-chiller

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

2.0

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

Table of Contents

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

One-touch Fittings

Union Tee: KQ2T 3 x Applicable tubing D Effective area [mm2] Min. port size Release button dimensions L1 L2 M Q O N Applicable tubing O.D.

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Note 3) q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Circulating fluid rated flow, r Circulating fluid: Tap water Note 4) Temperature at the thermo-chiller outlet when the circulating fluid flow is rated flow, and the circulating fluid outlet and return port are directly connected.

VXA21/22

Orifice size 2 3 4 3mm 4.5mm 6mm Refer to table q for configuration. Valve/Body 1 3 Normally closed (N.C.)/Manifold Normally open (N.O.)

VXP21/22/23

39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50 9 Series VXP21/22/23 Pilot Operated 2 Port

VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

Series PF2W Digital Flow Switch For Water

410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

PF2A/PF2W

times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 660 g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W3.

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)