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Table of Contents

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

1

SY 3 5 1 C6 1 0 3 SY q w r e t y u i o !0 !1 !2 !3 EX600 Top ported VM q Series u Coil type !

SY

solenoid 3 position 5 SY 3 2 4 A/B port size Series SY3000 SY5000 3 SY3000 5 SY5000 Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 Type of actuation 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 8 One-touch fitting C8 Mixed M 2 2 position double 3 3 position closed center 4 3 position exhaust center For mixed specifications, order separately on a

Air Slide Table

MXQ 6A-2 With end lock (6) Q Dimensions [mm] 5 J Model J Q MXQ6A-10Z2 57.5 25 MXQ6A-20Z2 MXQ6A-30Z2 78.5 5.5 Pilot port 2 x M5 x 0.8 7.5 33 MXQ6A-40Z2 90.5 MXQ6A-50Z2 100.5 0.5 3 3 34 8.5 5 3 23 MXQ6A-10Z2 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) 5 J * Dimensions other than those listed above are the same as those for the standard type. 5.5 MXQ 6A-2 With end lock, extension stroke

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

Table of Contents

VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement

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VQ 4 0 1 0 5 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant 1 2-position single 2 2-position double 3 3-position closed center 4 3-position exhaust center 5 3-position pressure center 6 3-position double check VV5Q41-07C8T0(-Q)1 setManifold base part no. *VQ4100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ4200-51(-Q)2 setsValve part no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

2/3 Port Valve

VXA3244 (6A) 1 8 280 Symbol 2.2 0.16 2.8 410 280 0.19 3.4 1.0 1.5 (8A) A C.O. 1 4 0.33 6 0.24 4.3 3 4 0.5 9 2.2 0.19 3.4 3 0.33 6 4 0.5 9 P P 410 (10A) 3 8 Construction/Components Note 1) Refer to p.4.0-14 the glossary for detail of max.operating pressure differential and max. system pressure.

Compact 5-Port Solenoid Valve

Product Precautions 14 JSY1000/3000/5000 Series Valve Construction Rubber Seal 2-position double 2-position single q e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

VDW

L Dimension (mm) n (stations) Dimension 2 3 4 5 6 7 8 9 10 L1 44 66 88 110 132 154 176 198 220 L2 53 75 97 119 141 163 185 207 229 L3 62 84 106 128 150 172 194 216 238 2 stns. x 1 Manifold composition 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.