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High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Table of Contents

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

1

Mounting bracket Bore size (mm) 6 10 16 Foot CJ-L006B CJ-L010C CJ-L016C Ordering Example of Cylinder Assembly Flange CJ-F006B CJ-F010C CJ-F016C T-bracket* CJ-T010C CJ-T016C Cylinder model: CDJ2D16-45SZ-NW-M9BW-B * T-bracket is used with double clevis (D).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Right flange surface Left flange surface Flange side r Temperature specifications/Heater t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

MY1

For 10, 16, 20 Lead wire length (m) Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Indicator light Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96 A93 M9N M9P M9B F9NW F9PW F9BW A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

5

Ordering Example of Cylinder Assembly Double clevis Cylinder model: CDJ2YD16-60Z-NW-M9BW-B Double knuckle joint Mounting D: Double clevis Pivot bracket N: Yes Rod end bracket W: Double knuckle joint Auto switch D-M9BW: 2 pcs.

Air Cylinder

D-X Technical Data 293 CG1 Series Rod Boot Material Ordering Example of Cylinder Assembly Clevis Symbol Rod boot material Maximum operating temperature J Nylon tarpaulin 70C K Heat resistant tarpaulin 110C Cylinder model: CDG1DN20-100Z-NW-M9BW Auto switch Maximum ambient temperature for the rod boot itself.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Lead wire length (m) Indicator light Indicator light Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96 A93 M9N M9P M9B F9NW F9PW F9BW A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 @2 %0 %1 %2 %3 %4 8-13-17 18 Series MY2 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Workpiece mounting center line LD through hole PA Workpiece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW PE PE LW NV Courtesy of Steven Engineering, Inc.-

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Lead wire length (m) Indicator light Indicator light Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A96 A93 M9N M9P M9B F9NW F9PW F9BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)