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Table of Contents

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

Slide bearing or ball bushing bearing available, Bore sizes from 20 to 100, End lock option allows holding of cylinder position, Four mounting styles, Wide range of made to order specifications, FELT, MGG/MGC/MGQL32, MGQL40, ACTUATOR, MGG GUIDED CYLINDER, L1, 32MM MGG PART, .01100 lb, SeriesDescriptionModelActionNoteVol. no.

Slide bearing or ball bushing bearing available, Bore sizes from 20 to 100, End lock option allows holding of cylinder position, Four mounting styles, Wide range of made to order specifications, FELT HOLDER, MGG/MGC/MGQL32, ACTUATOR, MGG GUIDED CYLINDER, L1, 32MM MGG PART, .00880 lb, SeriesDescriptionModelActionNoteVol. no.

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, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 * Manufacture of intermediate strokes at 1 mm intervals is possible.

High Vacuum Angle Valve

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

ISO Cylinder

Single foot: Cl85WEl lL (With mounting bracket) (W) LT NH LT (XS) 2 x AB Double foot: Cl85WEl lM (With mounting bracket) (W) LT UR 4 x AB NH LT (XL + Stroke) LS + Stroke AV US TR AO [mm] Bore size AB AO AV LS LT NH TRJS14 UR US (W) (XL) (XS) 8 4.5 5 11 70 {76} 3.2 16 25 26 35 12.8 75 {81} 23.8 10 4.5 5 11 70 (75) 3.2 16 25 26 35 12.8 75 (80) 23.8 12 5.5 6 14 80 (82) 4 20 32 33 42 18 88 (

Air Cylinder

, 100, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Table of Contents

-X168 (Example) MY2H40G-599L-A93-XB10 Symbol Symbol 2 Long Stroke -XB11 4 Copper-free 20Available with long strokes exceeding the standard strokes.

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9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Smooth Cylinder/Low Speed Cylinder

CDQ2YB325 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB405 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB5010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB6310 15 20 25 30 35 40 45 50 75 -100 CDQ2YB8010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB10010 15 20 25 30 35 40 45 50 75 -100 CQ-M8 x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L CQ-M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L

CXS

Nil (Example) A93 3m . L A93L 5m .