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Table of Contents

to 100 MGPL32 to 100 i !

MGQ

MGQM MGQL12 to 25 12 to 25/MGQM12 to 25 12, 16 Over 30 stroke Over 50 stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 30 stroke or less 50 stroke or less 20, 25 Over 30 stroke 32 to 100/MGQM32 to 100 MGQL32 to 100 Over 50 stroke 50 stroke or less 50 or more

smcmaintenancepartslist

size 32 3 to 4 1 125 15 to 17 3 100 8 to 10 2 80 6 to 8 1.5 63 4 to 5 1.5 50 3 to 5 1 40 3 to 4 1 100 st Extra 50 st 344 Series CL1 40 to 100 Replacement Procedure of Seal 3 6.

Air Cylinder MGQ Series Compact Guide Cylinder

MGOL /tO, 50, 63, 80, 1OO 25, 50, 75, 100 As to inremedrale slroke (5, 10, 15,20,30 35.. .. ), spacer ol5, 10, 15 20mm wdth wllbe used (EEmple) MGQM5o lO s produced by instaling 15mn spacer in MGQ'!

Title not found

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

02-mgq-e

Compact Guide Cylinder/With Air Cushion Series MGQ 12, 16, 20, 25 32, 40, 50, 63 80, 100 Replacement Procedure is P.333 Construction MGQM12 to 25 MGQM32 to 100 Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

CATALOG

-080-24A 80 36 11 72 85 45 110 CG-100-24A 100 50 12 93 100 60 130 Courtesy of Steven Engineering, Inc. !

A

-080-24A 80 36 11 72 85 45 110 CG-100-24A 100 50 12 93 100 60 130 Courtesy of Steven Engineering, Inc. !

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

CQS

Thus, it can be used in a Class 100 clean room.

Table of Contents

Caution 5 150 100 200 300 1.

Hydraulic

Refer to page 100.

MXS

MXS12-75 MXS12-50 MXS12-75 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N

MXS Series Air Slide Table

MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume