MU

Bore size (mm) 25 32 40 50 63 Mounting bracket (1) Foot Flange Single clevis Double clevis MU-L02 MU-F02 MU-C02 MU-D02 MU-L03 MU-F03 MU-C03 MU-D03 MU-L04 MU-F04 MU-C04 MU-D04 MU-L05 MU-F05 MU-C05 MU-D05 MU-L06 MU-F06 MU-C06 MU-D06 (3) Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Accessories for each mounting bracket are as follows.

MU

Size Note Auto switch mounting screw (M3 X 0.5 X 6.5l) Switch mounting nut Model Size 25 32 40 50 63 Mounting bracket 25, 32, 40, 50, 63 BMU1-025 Foot (1) MU-L02 MU-F02 MU-C02 MU-D02 MU-L03 MU-F03 MU-C03 MU-D03 MU-L04 MU-F04 MU-C04 MU-D04 MU-L05 MU-F05 MU-C05 MU-D05 MU-L06 MU-F06 MU-C06 MU-D06 Mounting screw set made of stainless steel Following stainless steel mounting screw set (included

MLU

Size Bracket 25 32 40 50 Note 1) MU-L02 MU-F02 MU-C02 MU-D02 MU-L03 MU-F03 MU-C03 MU-D03 MU-L04 MU-F04 MU-C04 MU-D04 MU-L05 MU-F05 MU-C05 MU-D05 Foot Flange Single clevis Double clevis Note 3) Note 1) When ordering foot brackets, order 2 pieces for each cylinder. Note 2) The parts included with each bracket are shown below.

Plate Cylinder with Lock Series MLU

Size Bracket 25 32 40 50 Note 1) MU-L02 MU-F02 MU-C02 MU-D02 MU-L03 MU-F03 MU-C03 MU-D03 MU-L04 MU-F04 MU-C04 MU-D04 MU-L05 MU-F05 MU-C05 MU-D05 Foot Flange Single clevis Double clevis Note 3) Note 1) When ordering foot brackets, order 2 pieces for each cylinder. Note 2) The parts included with each bracket are shown below.

2

Note 4) E100-M5-A l01-A E200-l02-A l03-A l02-A E300-l03-A l04-A E500-l06-A l02-A IS10E-40l03-A l04-A l06-A Pressure switch with piping adapter Note 4) l01-A IS10E-20l02-A l03-A l02-A IS10E-30l03-A l04-A Cross spacer Note 4) Y14-M5-A Y24-l01-A l02-A Y34-l01-A l02-A Y44-l02-A l03-A Y54-l03-A l04-A Note 1) l in round pressure gauge part numbers indicates a pipe thread type.

Modular F.R.L. Units

Model 1 Port size A B C D E Applicable model Y110-M5-A M5 x 0.8 11.2 19 12 14 8 AC10-A, AC10B-A Y210-l01-A 1/8 14.6 41.8 32 28 19 AC20-B, AC20B-B AC20C-B Y210-l02-A 1/4 Y310-l01-A 1/8 14.6 52.7 38.7 30 19 AC25-B, AC25B-B AC25C-B, AC30C-B Y310-l02-A 1/4 Y410-l02-A 1/4 18.6 62 44 36 24 AC40-B, AC40B-B AC40C-B Y410-l03-A 3/8 Y510-l02-A 1/4 18.6 66 46 44 24 AC40-06-B, AC40B-06-B AC40C-06-B Y510

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Switch body only)] PNP output / Wiring top entry Copper-free, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant,

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS AS12l1FG-M5 AS13l1FG-M5 M5 x 0.8 Gasket seal Note 3) AS-FE AS12l1FG-U10/32 AS13l1FG-U10/32 10-32UNF Note 3) KE AS22l1FG-l01 AS23l1FG-l01 1/8 Note 3) AS22l1FG-l02 AS23l1FG-l02 1/4 Note 3) Note 3) AS-FG AS-FG R NPT Note 1) Sealant AS32l1FG-l02 AS33l1FG-l02

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A B PE 38 46 + B A X EA EB P 21.5 6.4 21 G: Approx. 300 H: Approx. 600 77.9 (External pilot port) M5 x 0.8 M5 x 0.8 100.1 [102.3] (Pilot EXH port) (Lead wire length) With interface regulator 184.5 58.5 [65.5] 86.7 [93.7] 26.5 55 83.2 15 13.5 11.5 41.2 20.5 20.5 26.5 33 (P, EA, EB port) 3/8,1/4 69 69 (73) With plug (17) L plug connector (L): SY7140(R)-L02

Speed Controller with Indicator

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V R NPT Note 1) Sealant AS3ll1FSl-l02 1/4 V V V

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

+ X EA EB P 21.5 G: Approx. 300 H: Approx. 600 77 121.4 [125.8] 21 (External pilot port) M5 x 0.8 M5 x 0.8 (Lead wire length) (Pilot EXH port) 58.5 [65.5] Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 26.5 11.5 13.5 20.5 20.5 33 69 (P, EA, EB port) 3/8, 1/4 D Y L plug connector (L): 10-SY7240(R)-L02

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

23 0.5 0.5 3EB 1P 5EA 49.8 L plug connector with cover (LL) 52-SY9120-LL02 03 Insulation: Red (+) Insulation: Black () 4.1 16.7 14 0.3 mm2 L 148.3 (Lead wire length) Cable type (TT) 52-SY9120-TT02 03 Lead wire marking No.1 (+), No.2 () 0.75 mm2 L 165.1 (Lead wire length) Max.10 11 ATEX Compliant Body Ported Type Series 52-SY9000 Dimensions 2-position double L plug connector (L) 52-SY9220-L02

Intrinsically Safe Valve

connector with cover (LL) 53-SY7 20-LL-02 (-F2) 3 4 5 L (Lead wire length) 170.6 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 12 14.7 91.8 Terminal type (TT) 53-SY7 20-TT-02 (-F2) 3 4 5 Max. 10 L (Lead wire length) 204.2 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 108.6 10 Series 53-SY5000/7000/9000 Dimensions: 53-SY9000 2-position single L-type plug connector (L) 53-SY9120-L02

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 G36-10-l01 G46-10-l02 Gauge (5) 1.0MPa Accessories (Options)/Part No.

reduces flow setting time

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG R NPT Note 1) Sealant AS3ll1FSl-l02

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Table of Contents

Foot MGZ-L02 MGZ-L25 MGZ-L03 MGZ-L04 Flange MGZ-F02 MGZ-F25 MGZ-F03 MGZ-F04 Weight (kg) Note) Double clevis MGZ-D02 MGZ-D25 MGZ-D03 MGZ-D04 20 0.48 0.63 0.59 0.58 25 0.70 0.86 0.83 0.83 32 1.09 1.34 1.32 1.32 40 1.91 2.39 2.34 2.19 50 3.03 3.92 3.79 3.47 63 4.83 6.08 5.83 5.62 80 8.85 10.61 9.92 10.66 1.21 Bore size (mm) Basic style Foot style Flange style Bore size (mm) 63 Standard weight

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

All mounting brackets Weight per each 50 mm of stroke 0.18 0.21 0.28 0.39 0.59 0.78 Bore size (mm) 20 32 40 25 Foot MGZ-L02 MGZ-L25 MGZ-L03 MGZ-L04 Flange MGZ-F02 MGZ-F25 MGZ-F03 MGZ-F04 Theoretical Output (N) direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) Model Rod size (mm) Operating Bore size (mm) 50 80 63 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 726 236 1085 378 1621 603

Lubrication Equipment

to 03-1 AL4000-l02 to 04-1 AL4000-l06-1 AL5000-l06 to 10-1 AL6000-l10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications Individual lubrication Large flow style Model AL800 AL900 AC 4 1 1 Port size 2 1 1 2 AV Fluid Proof pressure Max. operating pressure Air 1.5MPa 1.0MPa AU AF 1 : 460 4 1 (1) Min. operating

IDX-OM-W026

,L03 M5 L03 L02 L01 9.5mm 2 1.25mm () L ,N N L () () M5 () 9.5mm 2 1.25mm M4 () (M3) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE