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Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

Series 11-MXJ Air Slide Table

Z ZZ H G 3 +0.03 0 depth 2.5 GA A 15 3.3 3.5 A 5.8 4 x M4 x 0.7 3 +0.05 0 depth 2.5 3 3.5 A-A Model G GA H I J K M Z ZZ 11-MXJ6-5 11-MXJ6-10 11-MXJ6-15 11 17 17 5 17 27.5 42.5 37 43 11 17 17 5 17 27.5 42.5 37 43 Other dimensions are the same as standard model (Series MXJ). 13 22 20 7 20 31.5 47.5 42 48 828 Air Slide Table 11-MXJ Dimensions Basic (Without switch rail) 11-MXJ8-N 12 (Plugged

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends)

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 15, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 47.5, Table Material: [Stainless Steel] Martensitic stainless steel, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 22, Table Size Height H(mm): 10.5, Table Parallelism(µm): 30, Environment: General Purpose, Maximum Load(

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Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

2

Tube size : O.D. 12 x I.D. 9 0.01 0.00 0 200 300 400 100 INDEX Inlet air flow rate (L/min [ANR]) 86 Series IDGA/IDG Reduced purge IDGA Series Purge Air Flow-rate Characteristics IDG1, 3, 5, 10, 20 (Standard dew point 20C) IDG3H, 5H, 10H, 20H (Standard dew point 15C) IDG30A, 50A (Standard dew point 20C) IDG30HA, 50HA (Standard dew point 15C) IDG30LA, 50LA (Standard dew point 40C) 125 IDG20

IDG

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

Series IDG

point: 15C (5F) Note) Standard dew point: 20C (-4F) Note) Standard dew point: 60C (-76F) Note) Standard dew point: 40C (-40C) Note) Standard purge Low dew point Low dew point Low purge Note) Standard purge rate: 35% Note) Standard purge rate: 20% Note) Standard purge rate: 25% Note) Standard purge rate: 10% IDG1 is not available with standard dew point 15C.

IDU/IDF

Meets specified Montreal Protocol Regulations Series IDF Series IDU Small series: R134a Medium series: R22 Large series: R407C IDU3D to 15C, IDF3D to 15C Available in single phase 200VAC without transformer Features 1 Series Variations Note) Screw type air compressor power (kW) Air flow capacity (l/min(ANR) 50 Hz 60Hz Series Page Rated inlet air temp.

Thermo-con/Rack Mount Type

Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 HECR004-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 1600 1600 1400 1400 Ambient temperature 35C Heating capacity [W] Heating capacity [W] 1200 1200 1000 1000 800 800 Ambient temperature 15C Ambient temperature 25C 600 600 Ambient temperature 25C 400

Refrigerated Air dryer Series IDU/IDF

Meets specified Montreal Protocol Regulations Series IDF Series IDU Small series: R134a Medium series: R22 Large series: R407C IDU3D to 15C, IDF3D to 15C Available in single phase 200VAC without transformer Features 1 Series Variations Note) Screw type air compressor power (kW) Air flow capacity (l/min(ANR) 50 Hz 60Hz Series Page Rated inlet air temp.

Free Mount Cylinder

Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Normally closed (NC=b contact), solid state switches (Model D-F9G, F9H) are also available. For detail, refer to page 7-9-23 in the Best Pneumatics 2004 Vol. 7 catalog.

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Indicator light (Red) 20 L H SET Vacuum supply port Vacuum pad connection port 7 35.6 Pressure setting trimmer Pneumatic circuit 600 (3000) + O 32 59 58 10.2 PV 6.5 18 V 8 10 17.6 10 5.5 2-3.3 Mounting hole Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 16-6-11 6 Series ZSE2/ISE2 01 T1 Dimensions/Standard Type: ZSE2Grommet type: ZSE2-15 01 T1 Connector type: ZSE2-15C 01

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In-line 0.5 (Nil) 3 (L) 5 (Z) DC AC Electrical entry Indicator light Wiring (Output) Perpendicular Special function Type M9NV F8N M9PV F8P M9BV F8B M9N M9P M9B Standard Standard Standard 3-wire (NPN) 3-wire (PNP) 24 V Solid state switch 5 V 12 V IC circuit Relay, PLC Grommet Yes 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) M9NZ

SMC Electronic Switch Series Variations

OFF Atmospheric pressure 0 3.9-3 Compact Pressure Switch ZSE1/ISE1 Dimensions Grommet style ZSE1-00 -14, -15, -18, -19 Connector style ZSE1-00 -14C, -15C, -18C, -19C Pressure setting trimmer Hysteresis setting trimmer Pressure setting trimmer Hysteresis setting trimmer HYS HYS SET1 SET SET1 SET 15 15 Indicator light Indicator light 23 23 23.4 23.4 PSE ZSE1-00 -16, -17 ZSE1-00 -16C, -17C ZSE4

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If an adsorption confirmation switch is replaced for a vacuum switch on ZX1071-K15LZ-PBC, indicate as ZSE2-0X-15C-D. In this case, mounting screws P3270148-49 (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. Ex.)

HRX-OM-W060

Item CH1 CH2 Setting range 15 to 25 20 to 40 CH2 set temperature CH1set By default 20 25 temperature [Tips] Sample set temperature: To change from CH1SP: 25C and CH2SP: 30C status, to CH2SP: 15C, first set CH1SP to 15C and then CH2SP to 15C. If CH2SP is set to 15C before setting CH1SP to 15C, then the following message appears: Please set CH1SP first.