Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16

Series MXP Precision Air Slide Table

-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth 4.5 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

smcmaintenancepartslist

Type MXP8 MXP10 MXP12 MXP16 Tightening torque joint shaft 0.4 Nm 0.7 Nm 1.8 Nm 3.6 Nm Note 1) Assemble end plate so that A, B dimensions will be values on table below. (mm) A B Type MXP8 Body (Note 1) 0.2 0.2 MXP10 End plate (Note 1) MXP12 0.5 0.3 MXP16 Bolt torque 0.45 Nm Type MXP8 MXP10 MXP12 MXP16 A 0.6 Nm B 1.4 Nm 12. Remove the end plate mounting bolt on the opposite side. 13.

Bore Size: 12mm, Stroke: 15mm, Adjuster: C (Metal Stopper)

Type: Table Type, Cylinder Inner Diameter(Ø): 12, Stroke(mm): 15, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 29, Table Material: [Aluminum] Aluminum, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 32, Table Size Height H(mm): 22, Table Parallelism(µm): 20, Environment: General Purpose, Maximum Load(kg): 1.7, Port Screw Type: M screw, Adjuster

1

B -X51 MXP6 Standard product 2.4 2.4 Z 2-plugs: M-3P -X23 (mm) Z 2-hexagon socket set screws: M3 A 20 20 25 B 10.5 9 12 C 8 9 10 D 4.5 5 6 Model MXP10--X51 MXP12--X51 MXP16--X51 (mm) Z 45 60 Model MXP6-5-X23 MXP6-10-X23 MXP10/12/16 Standard products 2-plugs: M-5P 3 3 Z -X23 Z 2-hexagon socket set screws: M5 x 4 (mm) Z 60 90 76 106 102 128 Model MXP10-10-X23 MXP10-20-X23 MXP12-15-X23 MXP12

Table of Contents

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

2

Tube size : O.D. 12 x I.D. 9 0.01 0.00 0 200 300 400 100 INDEX Inlet air flow rate (L/min [ANR]) 86 Series IDGA/IDG Reduced purge IDGA Series Purge Air Flow-rate Characteristics IDG1, 3, 5, 10, 20 (Standard dew point 20C) IDG3H, 5H, 10H, 20H (Standard dew point 15C) IDG30A, 50A (Standard dew point 20C) IDG30HA, 50HA (Standard dew point 15C) IDG30LA, 50LA (Standard dew point 40C) 125 IDG20

Series IDG

point: 15C (5F) Note) Standard dew point: 20C (-4F) Note) Standard dew point: 60C (-76F) Note) Standard dew point: 40C (-40C) Note) Standard purge Low dew point Low dew point Low purge Note) Standard purge rate: 35% Note) Standard purge rate: 20% Note) Standard purge rate: 25% Note) Standard purge rate: 10% IDG1 is not available with standard dew point 15C.

IDG

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

IDU/IDF

Meets specified Montreal Protocol Regulations Series IDF Series IDU Small series: R134a Medium series: R22 Large series: R407C IDU3D to 15C, IDF3D to 15C Available in single phase 200VAC without transformer Features 1 Series Variations Note) Screw type air compressor power (kW) Air flow capacity (l/min(ANR) 50 Hz 60Hz Series Page Rated inlet air temp.

Refrigerated Air dryer Series IDU/IDF

Meets specified Montreal Protocol Regulations Series IDF Series IDU Small series: R134a Medium series: R22 Large series: R407C IDU3D to 15C, IDF3D to 15C Available in single phase 200VAC without transformer Features 1 Series Variations Note) Screw type air compressor power (kW) Air flow capacity (l/min(ANR) 50 Hz 60Hz Series Page Rated inlet air temp.

Thermo-con/Rack Mount Type

Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 HECR004-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 1600 1600 1400 1400 Ambient temperature 35C Heating capacity [W] Heating capacity [W] 1200 1200 1000 1000 800 800 Ambient temperature 15C Ambient temperature 25C 600 600 Ambient temperature 25C 400

01-mxp-e

Contents Bore size (mm) MXP8-PS 8 10 12 16 MXP8-PS MXP10-PS MXP12-PS MXP16-PS !4 !8 !9 NBR, stainless steel Gasket (for plug) MXP10-PS MXP12-PS MXP16-PS A set of two of !4, !8 and !9 each Piston seal NBR O-ring Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

Bore Size: 12mm, Stroke: 15mm, Adjuster: C (Metal Stopper), Magnet: Magnet and Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 12mm, Stroke: 15mm, Adjuster: C (Metal Stopper), Magnet: Magnet and Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 12mm, Stroke: 15mm, Adjuster: C (Metal Stopper), Magnet: Magnet and Rail, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Bore Size: 12mm, Stroke: 15mm, Adjuster: C (Metal Stopper), Magnet: Magnet and Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)