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Bore Size: 12mm, Pilot Port Location: Left, Stroke: 5mm, Mounting Bolt: w/Mounting Bolt, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Pilot Port Location: L (Left), Stroke: 5mm, Mounting Bolt: L (w/Mounting Bolt)

Compact

CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for mounting) 17 37.4 11.5 2 x M3 x 0.5 (Pilot port) 32.5 + Stroke 34 + Stroke 31.5 7.7 11.5 23 24.5 + Stroke 16.3 + Stroke 14.4 23 (37.4) 2 x M3 x 0.5 depth 2.5 1.5 8 +0.1 6 0 depth 2.5 Auto switch 14 MXZ12R(Pilot port location: Right) MXZ12L

This is a legacy product, and replaced byCDQSB16-10D-M9BVLS

Table of Contents

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output M3 x 5L DC (+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC () Blue 1 2.

Shock Absorbers and Rate Controls

(iltodel) (rtolog l,lo, (lttodel) I ( t) t t( l(r wf wt ryrrl t44 162 58 l3l4-12 l.lN 38 44 TI 5l 't0 LR0EMrAxl 144 162 58 t3la.12 UN l 3 38 44 92 23 5l l0 0t[%r2 195 213 58 l3/+12 UN l 3 38 44 8 23 LR0tIUl316x2 t95 213 58 l314-12 U t3 38 44 | 8 23 2l 5l t2 0t r/x3 216 264 58 Ir7r.12lJti t3 38 44 143 23 2t 5l t 2 LR0E[tl%xl 1 7 5 r93 77 2'lz l2 UN t9 50 57 l t 4 26 26 70 l2 lEfill7sr2 225

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

SQ1000/2000

A port 10 Example) SQ1141-5L-C6-A (N.O. specification) A port plug O-ring Example) SQ1141-5L-C6-B (N.C. specification) B port B port plug Example) SQ1141-5L-C6-B-M (B port plug with manifold block) Direct exhaust outlet with built-in silencer [-S] The exhaust outlet is placed on the top side of the manifold end plate. The built-in silencer provides highly effective noise reduction.

HRX-OM-X084

/min) / 0.11(at 5L/min) Pump capacity (50/60Hz) For option T10.35(at 5L/min) / 0.35(at 5L/min Rated fiow (50/60Hz) 7 L/min 5 / 5 For option T15 / 5 Flowdisplay range21 L/min 2 to 16 Circulating fluid system Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM) Particle filter nominal filtration rating20 m 35 Bypass

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

Low Differential Pressure Sensor

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.

PSE550/300

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output M3 x 5L DC (+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC () Blue 1 2.

ZSE30A(F)/ISE30A

One-touch fittings 6 mm straight One-touch fittings 1/4 inch straight One-touch fittings 4 mm elbow One-touch fittings 6 mm elbow One-touch fittings 1/4 inch elbow 4 cores, for 2 outputs, 2 m Mounting screw (with 2 pcs. of M3 x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Table of Contents

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Mechanical Valves Series NVM, NVFM, NVZNI

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

IIIIIII

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

Digital Flow Switches, Series PF2A, Series PF2W

/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics Current consumption (No load) Weight Note 3) Port size (Rc, NPT, G) Detection type Indicator light Operating pressure range