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Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

1

CK1 Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) C(L)K M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) C(L)KU 5 V,12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v

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9 10 0.1 0.3 500 2.5 1000 5 0 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax (mm/s) 2000 10 32 1/4 1/4 2500 3000 12.5 15 30 6 10 1/4, 3/8 = 0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1/4, 3/8 3/8 3/8 3/8 1500 2000 2500 3000 12 16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500

Electric Actuator/Slider Type

T1 = V/a1 = 300/3000 = 0.1 [s], a1 a2 T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] Time [s] T2 = L 0.5V(T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Integrated Controller

1000 1200 1400 3000 mm/s2 2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 1.5 1 0.5 5000 mm/s2 10 mm/s2 0 1400 200 400 600 800 1000 1200 0 Speed: V [mm/s] Speed: V [mm/s] EQFS25HA/Ball Screw Drive Horizontal/Lead 12 Vertical/Lead 12 35 9 8 7 6 5 4 3 2 1 0 3000 mm/s2 30 Work load: W [kg] Work load: W [kg] 3000 mm/s2 25 20 15 10 10 mm/s2 5000 mm/s2 5 0 0 0 Speed: V [mm/s] 100 200 300 400

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

15

3000 Motorless Motorless Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Made to Order

16, 20, 50, 63, 80, 100 16, 20, 25, 32, 40, 50, 63 16, 20, 25, 32, 40, 50, 63 16, 20 16, 25, 40 16, 25, 40 MY1B 100 to 2000 16, 20, 25, 32 25 to 200 CXWL 2001 to 5000 (3000 for 16 only, 3000 for MY1MW) MY1M (W) 100 to 2000 10 to 75 10 80, 90, 100, 110, 120, 125, 150 110, 120, 125, 150 2001 to 5000 (3000 for 16 only, 3000 for MY1CW) MY1C (W) 100 to 2000 CXSJ 10 to 100 15 MY1H MY2C MY2H/HT

Environment

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

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Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

MY1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) Symbol Specifications 16 3000 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 -XB11 Long stroke 20, 25, 32, 40 50, 63 -XC18 NPT finish piping port 5000 -XC67 NBR rubber lining in dust seal band Strokes are manufacturable in 1 mm increments, up to the maximum stroke.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Magnet: Built-in, Mounting: Basic, Cushion: Rubber Bumper, Bore Size: 1 1/2", Stroke: 30", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: D (Built-in), Mounting: B (Basic), Cushion: N (Rubber Bumper), Bore Size: 40 (1 1/2"), Stroke: 3000 (30")

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

High Vacuum Angle Valve

(5000) Heat-resistant heavy-duty cord 3.4 40 Most sensitive position 7 3.4 3000 20 XL Series Specific Product Precautions 1 Be sure to read this before handling the products.

2

Example) IS10M-30-6LP Symbol Description V q Body size 20 30 40 50 60 a Set pressure range Nil 0.1 to 0.4 MPa 6 Note 1) 0.1 to 0.6 MPa Semi-standard + Nil 0.5 m b Lead wire length V w L 3 m 23 15 Z 5 m (13) + c Pressure unit of the scale plate Nil MPa (23) (5000) (3000) (500) P Note 2) MPa/psi dual scale Note 1) Set pressure range of 6P (L, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

Table of Contents

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator