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CATALOG

OPTION T E C H N I C A L SPECIFICATIONS XB9 NCJ2 Applicable Cylinder Bore Size 6, 10, 16 Action Double Acting (Single/Double Rod) Single Rod W Double Rod S T R O K E Ambient and Fluid Temperature -55C~+70C / -67~160F M O U N T I N G B O R E S I Z E Piston Velocity 10 ~ 50 mm/s (-4 ~ 2in/s) Mounting Type Basic, Axial Foot, Rod Side Flange A L S O A V A I L A B L E : XB13 OPTION LOW SPEED

Bore Size: 5/8", Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: -

Bore Size: 15 (5/8"), Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00

Bore Size: 15 (5/8"), Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: XC57 (Floating Joint)

Bore Size: 15 (5/8"), Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: XB13 (Low Speed 0.3 to 2.0 inch/sec)

Bore Size: 5/8", Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: Floating Joint

Bore Size: 5/8", Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: Low Speed 0.3 to 2.0 inch/sec

Series AP500

Vespel is a registered trademark of DuPont. 3 Low to intermediate flow Single Stage Regulator for Ultra High Purity Series AP1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e r

Table of Contents

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

Series AK1000

Single Stage Regulator for General Applications Low to intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure

Thermo-chiller/Rack Mount Type

0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR030-A-20, HRR030-W-20 [50 Hz] [60 Hz] 4000 4000 25C 25C 3500 3500 Cooling capacity [W] Cooling capacity [W] 3000 3000 32C 2500 2500 32C 2000 2000 40C 1500 1500 40C 1000 1000 Ambient temperature or facility water temperature Ambient temperature or facility water temperature Ambient temperature or facility

Compressed Air Preparation Filter

flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500 1500 1000 3000 3500

HRX-OM-M090

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

HRX-OM-W002

Ambient temp. 3500 or or or 3500 or or 2000 2000 2000 2000 Facility water temp. Facility water temp. or Facility water temp. Facility water temp. Facility water temp. Facility water temp.

JXCx-OMU0004

125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 56 No.JXC-OMU0004-A 10.4 LEYLEYG LEYLEYG LEYLEYG [mm/s] 20 2] 1000 [mm/s [mm/s] 10 2] 1000 [mm/s [mm] 1 3 LEY16LEYG16 LEY25LEYG25 LEY32LEYG32 LEY40LEYG40 A B C A B C A B C A B C 14 27 51 63 126 232 80 156 296 156 298 570 26 50.5 96 92.5 182

VHS

1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !