Electric Actuator with Integrated Guide

time C: Deceleration time D: Resting time (0.5 sec.)

LEC-OM02704CN

)0 RX(n1)1 RY(n1)9 RX(n1)9 RY(n1)A RES RX(n1)A ALM 15 RX(n1)B Ready CRD RY(n1)B RX(n1)C RY(n1)F RX(n1)F (RWwn) (RWrn) RWwn 1 RWrn 1 RWwn1 2 RWrn1 2 RWwn2 RWrn2 RWwn3 RWrn3 . n 3 11 3CC-Link (2) 2 RXn/RYn64RWrn/RWwn8 (RYn) (RXn) () () CN6 () () CN6 RYn0 ON SON RXn0 RD 14 RYn1 ST1 RXn1 INP RYn2 ST2 RXn2 CPO RYn3 DOG 2 RXn3 ZP 16 RYn4 LSP 3 RXn4 TLC RYn5 LSN 4 RXn5 RYn6

Compact 5-Port Solenoid Valve

For D-sub Connector/Flat Ribbon Cable/Lead Wire pp. 21, 55, 119 1 3 5 JJ5SY 10 R For Terminal Block Box pp. 43, 119 1 3 5 T TC JJ5SY 10 R pp. 83, 73, 91, 119 For EX260/EX245/EX120 1 3 5 S S3 JJ5SY R 10 SUP/EXH block assembly R External pilot * The combination of external pilot type R and silencer type S is not available. * Only the JSY3000/5000 can be selected for the EX245.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Rated Flow Range: 02 (0.02 to 2 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 0.02 to 2 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: Panel Mount Adapter, w/o Flow Adjustment Valve, Calibration Certificate: Calibration Certificate, Made to Order: -

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Aluminum High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

C85

WBWB G1 G1 8 8 to 25 HR N1 N1 Rail mounting type (A) Band mounting type (B) or non-magnet S + Stroke ZZ + 2 x Stroke Wh KK With rod boot C e K 9 9 I f AM h (mm) ND h8 BE KK EE N1 G1 KW NA D F KV HR K ZZ Bore C AM WA SW S WB H WH 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 19 6 28 16 7 7 11.5 48{54} 104{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 4.5 19 6 10.5 28 16

Fieldbus System

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

7.4

Bar Base Individual Wiring: C Kit S0700 Series RoHS How to Order Manifold SS0755 C 08 C4 Base Mounted Option Symbol Type Nil None R Note) External pilot Stations Symbol Stations 02 2 stations Note) For details, refer to page 755.

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

0.4

N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

CATALOG

www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E

5 Port Solenoid Valve Series SY3000/5000/7000/9000

P R R P R R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting The silencer plugs directly into the One-touch fittings of the manifold.

SZ3000

(A) 4 (B) 2 B SOL.b SOL.a 3 (R) 5 (R) 1 (P) Pilot type 4 position dual 3 port valve: N.C./N.O. Nil R Internal pilot (A) 4 (B) 2 External pilot Dual 3 port valves are not available with external pilot specifications. C SOL.b SOL.a 3 (R) 5 (R) 1 (P) 1-3-33 34 Series SZ3000 Specifications Specifications SI Unit Part No. 24 VDC +10%/5% Symbol Part no.

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.