PF2M7.eng

Used as switch output device (ZS-33-D(M)) To obtain the operation manual about this product and control unit, please refer to the SMC website (URL https://www.smcworld.com) or contact SMC directly. [dt1] Delay time setting [0.00] 0.00 second Flow adjustment valve Orifice mechanism to adjust the flow.

1

(mm) Auto Switch Mounting Height Auto switch model Band mounting D-H7l/H7lW D-H7NF D-H7BA D-C7l/C80 D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9l D-M9lW D-M9lA D-A9l D-H7C D-C73C D-C80C Hs Hs Hs Hs Hs 6 15 16 15 18 17.5 10 17 18 17 20 19.5 16 20.5 21 20.5 23.5 23 Bore size (mm) Auto switch model Rail mounting D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-F7l/J79 D-F7lW/J79W D-F7BA/F79F

Electric Actuator with Integrated Guide

D C B A 7 11 Standard Motor Series LTF6 Motor Output Rolled Ball Screw 100W 10mm/10mm lead Horizontal Mount How to Order Stroke LTF6E NH 1 R 2 Motor/switch entry direction Left entry Power supply voltage Cable length 1 2 2 3 4 5 100V/110V AC(50/60Hz) 200V/220V AC(50/60Hz) 2m 3m 4m 5m Motor/switch entry direction R L Motor straight, motor cable, switch and switch rail located on the right

Compact 5-Port Solenoid Valve

For D-sub Connector/Flat Ribbon Cable/Lead Wire pp. 21, 55, 119 1 3 5 JJ5SY 10 R For Terminal Block Box pp. 43, 119 1 3 5 T TC JJ5SY 10 R pp. 83, 73, 91, 119 For EX260/EX245/EX120 1 3 5 S S3 JJ5SY R 10 SUP/EXH block assembly R External pilot * The combination of external pilot type R and silencer type S is not available. * Only the JSY3000/5000 can be selected for the EX245.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U D B C3, N1 C4, N3 C6, N7 (R) Stations Directional Control Valves Air Grippers Modular F.

Series SV

(S, R, RS) (-D) U D B C3, N1 C4, N3 C6, N7 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

LEC-OM02704CN

RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3)A50ms (RY(n1)ARY(n3)A)(15.12.4(1)) RY(n1)ARY(n3)A PD20(D-1)0 RY(n1)A RY(n+3)A 15 10 15 (2) () CN6 CC-Link () 1 2 CN6-14ON RXn0ON RXn0 RXn0 RXn1PA10 ONRXn1 RXn1 RXn1 RXn2OFF ONRXn2 RXn2 RXn2 CN6-16RXn3ON RXn3ONOFF ON(RYn0) (EMG) (RY(n1)ARY(n3)A) (LSP)

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Fieldbus System

Select a valve from R, U, NS or NZ when the SI Unit common is negative common. 18 Series SY3000/5000 Dimensions: Type 10/For EX600 (M12 Connector)/Series SY3000 (mm) C2 C3, N1 C4, N3 C6, N7 2 4 SS5Y3-10S6l l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Note 2) (L5) L1 ( ) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B)

SV

B C3, N1 C4, N3 C6, N7 (S, R, RS) (-D) Stations When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

0.4

VQZ 7 6 5 4 3 2 1 n D side Stations U side SQ VFS D-sub> VFR (DIN rail clamp screw) VQ7 BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 (7.5) 20.5 One-touch fitting 13.4 56.9 [1(P), 3(R) port] Applicable tubing O.D.

Table of Contents

brackets A and D.

7.4

type) 2 x 1/8 3(R) port = Thread type Manual override 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) 2 x 4.5 Mounting hole 81 (Closed center) R 3 P 1 X 36.5 9 32 24.1 P 1 15.6 2 x 1/8 1(P) port = Thread type 10.2 Indicator light Stations 1 2 3 4 5 6 7 8 n D side U side 39.7 With plug connector/light B 2 B 2 20 14 A 4 A 4 5 14.6 2n x C2, C3, C4, M5, N1, N3 <4(A), 2(B) port>

SX

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

CATALOG

~ 50mm/s H O W T O O R D E R S E R I E S NCY2 B A S I C T Y P E A I R H Y D R O R O D L E S S C Y L I N D E R O P T I O N H O W T O O R D E R S E R I E S NCY2 S L I D E R T Y P E A I R H Y D R O R O D L E S S C Y L I N D E R O P T I O N X116 NC(D)Y2 S X116 NCY2 B S W I T C H B O R E S I Z E S T R O K E ( I N C H) B O R E S I Z E S T R O K E A D J U S T M E N T M A G N E T I C H O L D I N

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(-D) [ ]: AC When P, R port outlets are indicated on the D side, the P, R ports on the opposite side are plugged.

SZ3000

A 4 (B) 2 (A) 4 B 2 Manual override A SOL.b SOL.a 3 (R) 5 (R) Nil: Non-locking push type D: Push-turn locking slotted type 1 (P) 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 B SOL.b SOL.a 5 (R) 3 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector