Electric Actuator with Integrated Guide

(In this case, be sure to connect a reverse voltage suppression diode.) + +V D OUT OV X Relay Other Warning 1.

High Vacuum Angle Valve

With indicator K (DN) E H V I G L H A V V M A C U U Without indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N

Fieldbus System

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA EX600-AMB Max. rated input signal 22 mA Note 2) 15 V 250 100 k Input impedance 0.05% F .S.

SV

0 V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

B C3, N1 C4, N3 C6, N7 (R) (-D) Stations Tie-rod base manifold: 10-SS5V1-10 D Directional Control Valves Air Grippers Modular F.

Aluminum High Vacuum Angle Valve

With indicator K (DN) E H V I G L H A V V M A C U U Without indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N

Series SV

(S, R, RS) (-D) U D B C3, N1 C4, N3 C6, N7 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

Table of Contents

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

7.4

1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page 755 Page 755

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

CATALOG

F u r t h e r t o t h e b o d y p o r t e d , s u b b a s e m o u n t e d a n d m o d u l a r stacking manifold types, the VQ series also offers two new a n d i n n o v a t i v e m u l t i p l e v a l v e v a r i a n t s , t h e f l i p a n d cassette types.

CM2

/B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-C7/C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C D-B59W D-A3A D-G39A D-K39A D-A44A D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A3A D-G39A D-K39A D-A44A D-G5NTL

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

5 Port Solenoid Valve Series SY3000/5000/7000/9000

VFS Without light SY100-61-1 With light (8) VFR (17) Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

ISO Cylinder

Applicable auto switch Description Size Quantity BBA4 Auto switch mounting screw M3 x 0.5 x 15 L 1 BJ2-008S, BJ2-010S, BJ2-012S, BJ2-016S D-C7, C8 D-H7 BM2-020AS, BM2-025AS, BM2-03AS, BM2-040AS 112 C85/C75 Series Rail Mounting Type Mounting Bracket Solid state D-M9N(V), D-M9P(V), D-M9B(V), D-M9NW(V), D-M9PW(V), D-M9BW(V), D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90

0.4

The power supply for the unit should be 0 V as the standard for both power supply for output as well as power supply for control/input. VQZ SQ VFS +24 V +24 V Power supply for output Power supply for output VFR 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V VQ7 4. Do not install a unit in a place where it can be used as a foothold.

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Table of Contents

D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Direct Mounting Style ... D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Direct Mounting Style . 2-color Indication Type with Diagnostic Output. D-F79F Rail Mounting Style. Water Resistant 2-color Indication Type. D-F7BA(V)L Rail Mounting Style . D-F9BAL Direct Mounting Style. D-Y7BAL Direct Mounting Style.

Modular F.R.L. Units

V V V V V D*5 N.O. (Normally open) Drain port is open when pressure is not applied.