Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN)

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: Calibration Certificate, Made to Order: -

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: Calibration Certificate, Made to

LEC-OM02704CN

() (15.3.2(3)) RY(n+2)6 RY(n2)7 1 RY(n+2)7 * (RXnC)OFF (RXnC)OFF(RY(n2)7)ON (RY(n2)7) (RY(n2)6),(PC35) 15 9 15 () 1 2 RY(n2)8PB29PB32 RY(n2)8 RY(n+2)8 (3.6.3) OFF RY(n+2)A (RYnARYnE) ON (RWwn4RWwn6) PC30()2 1 RY(n2)CRY(n2)DRY(n2)E18 RY(n2)C 2 RY(n2)D RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3

1

, 1/8" 4, 5/32" 6, 1/4" One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 8, 5/16" (Station 1) (Station n) 59.5 P 1 P 1 B 45.5 2 2 B 2 B 2 B 2 B 24.6 E E 23 A 4 A 4 A 4 A 4 A 4 10 8.6 11.8 (For DIN rail mounting) 7.5 (Pitch) P = 10.5 18.3 13.5 18.3 L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 47 x n2 + 81 n1: Valve stations n2

Compact 5-Port Solenoid Valve

2 B 2 B 2 1 P P 1 4 A 4 A 4 A 4 A 4 A S Built-in silencer P, E port entry: D Calculation formula for L dimensions L = 6.5 x n1 + 9 x n2 + 39.6 Silencer (Exhaust port) (Built-in silencer specification) n1: Number of 6.5 mm pitch manifold block stations (Applicable fitting: 2, 4) n2: Number of 9 mm pitch manifold block stations (Applicable fitting: 6) A A B B 4 A A * These

Fieldbus System

B 56.6 13.2 E 3/5 E 3/5 33.4 29.1 4 A 4 A 4 A 4 A 4 A 12.4 14.1 8.7 (For DIN rail mounting) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 10, 3/8" (Pitch) P = 16 (20.5) 20 18 L1 = 16 x n1 + 141.5 + 47 x n2 L2 = 16 x n1 + 48 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 81.5 Note 1) These figures show the SS5Y5-10S6Q22-05D-C8.

5-Port Solenoid Valve

E 3/5 4 A 4 A 4 A 4 A 4 A Calculation formula for dimensions with D-sub connector and Flat ribbon cable (For DIN rail mounting) (7.5) (11.8) L1 = 12.5 x n1 + 16 x n2 + 76.4 L2 = 12.5 x n1 + 16 x n2 + 48 M = (L1 + 6.1)/12.5 + 1 Decimal fractions are truncated.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications (Pitch) 24 P=24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E) port

Fieldbus System

45.5 2 2 B 2 B 2 B 2 B 24.6 3/5 E 3/5 E 23 A 4 A 4 A 4 A 4 A 4 8.6 10 7.5 (Pitch) P = 10.5 11.8 (For DIN rail mounting) 18.3 L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 47 x n2 + 81 13.5 18.3 L1: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 0 1 2 3 4 5 6 7 8

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

E 4 A 3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

0.4

q w e q w VQC1100 VQC1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A)

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

MB

3 A only MBK32 A A Width across flats CJ1 Rod view A-A' CJP A' CJ2 !2 !1 Component Parts CM2 Description Piston nut Washer Lock nut Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Description Material Note Material Note No. q w e r t y u i o !0 !1 !2 No. !3 !4 !5 !6 !7 !8 !

C85

U A B C D E F G H Bore Model Nominal thread dia.