2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-Lm-mmm : 0 x 00023B (571) PF2M721-m-L2m-mmm : 0 x 00023C (572) PF2M721-m-L3m-mmm : 0 x 00023D (573) PF2M721-m-L4m-mmm : 0 x 00023E (574) 12 PF2M7(-L) Series Set Point Range and Rated Flow Range Set the flow rate within the rated flow range.

PF2M7.eng

: 100 L/min [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min PF2M725: 1.3 L/min, PF2M750: 2.5 L/min PF2M711: 5 L/min, PF2M721: 10 L/min Socket Thank you for purchasing an SMC PF2M7## Digital Flow Switch.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

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Note 2) : Number of stations, 02 to 24 (VQC4000: 02 to 16) 902 Series VQC Specific Product Precautions 1 Be sure to read this before handling. Refer to Front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions.

Metal Seal/Rubber Seal Series VQ Body Ported

When both options are specified, indicate as DN.

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

5 Port Solenoid Valve Series VQZ1000/2000/3000

Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 978.

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

VQZ1000/2000/3000

AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

EX120/121/122

D-DN This catalog is printed on recycled paper with concern for the global environment.

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

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D-DN This catalog is printed on recycled paper with concern for the global environment.

Modular F.R.L. Unit

) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E

5-Port Solenoid Valve

Symbol Stations Note 02 2 stations All double wiring Symbol Stations Note 02 2 stations All double wiring 09 9 stations 02 2 stations All single wiring 04 4 stations 02 2 stations All single wiring The asterisk denotes the symbol for the assembly.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-12 SV 400 SYJ 200 70% 50% 10% SZ 0 MB 80 800 VP4 600 S0700 AS5000-02 AS420-02 400 VQ 200 VQ4 0 SV400 AN300 -KM12 T1209 VQ5 800 MB 100 VQC 600 AS5000-02 AS420-02 400 VQZ 200 SQ 0 VFS CS1 125 800 VFR 600 VQ7 AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details

5 Port Solenoid Valve

Blanking plug (For one-touch fittings) L KJP-02 Dimensions 23 04 06 KQ2P(mm) A Applicable fitting size d 2 3.2 4 6 A L D Model Weight: g KJP-02 KQ2P-23 KQ2P-04 KQ2P-06 8.2 16 16 18 17 31.5 32 35 3 3.2 6 8 0.1 1 1 1 It is inserted into an unused cylinder port and SUP/EXH ports.

Compact 5-Port Solenoid Valve

PG/PGC: Flat ribbon cable (20 pins) PH/PHC: Flat ribbon cable (10 pins) Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 09 9 stations 02 2 stations Specified layout*2 (Up to 18 solenoids available) 04 4 stations 02 2 stations Specified layout*2 (Up to 8 solenoids available) o Mounting and Option * Enter the number of stations inside m

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

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Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5