V100

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

SX

3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 116 SX3000: Serial Transmission Unit/Plug-in SS5X3-45SStations UC4 C6 (Pitch) P = 10.5 DIN rail release button 2-One-touch

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

suppressor) : 6, 1/4" Approx. 300 (Lead wire length) (C6: 3.2) (N7: 7) Manual override Manual override (N7: 7) (C6: 3.2) (3) 97.3 [101.7] 8 33 15.7 34 88.8 [93.2] 37.2 28.7 37.9 [40.1] B B B B B (3) 5.5 35 A A A A A 97.3 [101.7] 8 37.2 28.7 37.9 [40.1] 34 33 15.7 B B B B B 88.8 [93.2] 5.5 35 DIN rail L3 5 (L4) A A A A A DIN rail holding screw (Rail mounting hole pitch: 12.5) L2 L1 DIN rail

SV

0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line with shield Twisted pair wire Master unit SI unit SI unit FG DG DB DA FG DG DB DA DG DB DA Terminal resistor Terminal resistor SLD FG b) 3-wire type with shield Twisted pair wire Type 3 ground Type 3 ground

CATALOG

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

SY

Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 A, B port C4 (4 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C4 (4 One-touch fitting) C8 (8 One-touch fitting) C10 (10 One-touch fitting) C6 (6 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) P to A/B 3.96 (0.22) A/B to EA/EB 4.14 (0.23) C6: P to A/B 9.54 (0.53) A/B to EA/EB 9.0 (0.5) C8: P to A/B 16.2 (0.9

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Kit Manifold C Connector 2 Body ported Stations 2 stations 02 20 stations 20 How to Order Valve C6 VQZ 1 2 1 1 5 M Port size {4(A), 2(B) port} VQZ2000 VQZ1000 Symbol Port size VQZ3000 Series v v v v v v v C3 C4 C6 C8 C10 M5 02 One-touch fitting for 3.2 v v v v VQZ1000 Body width 10mm VQZ2000 Body width 15mm VQZ3000 Body width 18mm 1 2 3 One-touch fitting for 4 One-touch fitting for

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

v 01 02 03 Configuration v v 2 position single (B) 2 (A) 4 1 Manual override 5 (R1) 1 (P) 3 (R2) Non-locking push style (Flush) : B: Locking style (Slotted) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2) 3 position closed center (B) 2 (A) 4 3 5 (R1) 1 (P) 3 (R2) Electrical entry 3 position exhaust center (A) 4 (B) 2 G: Grommet (DC specification

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Sensors A B A B 29.6 12.2 53.4 6.2 Manual override Press and turn for the locking type. ( ) 4(A) port side: Orange 2(B) port side: Green DIN rail holding screw (For DIN rail mounting) L2 5 (Rail mounting hole pitch: 12.5) L1 (Station n) (Station 1) With option Light/surge voltage suppressor 4 A 4 A 4 A 4 A 78.5 42.5 3/5 3/5 E E 63.5 61.9 52.5 2 B 2 B 2 B 2 B V 5 V 5 P 1 1 P V 1 P 3 E V 1

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] 4(A) (B)2 2(B) (A)4 Apparent power (VA) AC 5(R1) (R2)3 1 (P) (R1)5 1 (P) 3(R2) Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) 3 position exhaust center 3 position exhaust center Surge voltage suppressor Indicator light 4(A) (B)2 2(B) (A)4 Common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

Series SV

A, B port size (metric) A, B port size (inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting A, B ports mixed

SZ3000

Crossover wiring (Sensor link system) DG DG 24 V 0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply {

Fieldbus System

] DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 X X 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

blanking plate assembly SYJ5000-21-4A 10 SS5YJ5 42 05 C6 Clean series Number of stations 02 2 stations -+ -+ A : : B B R port 1/4 R P Applicable individual EXH spacer assembly SYJ5000-17-1A Applicable individual SUP spacer assembly SYJ5000-16-2A 20 20 stations Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 C6 One-touch fitting for 6 N7 One-touch fitting

SYJ3000/5000/7000

M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

42

8 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 4 A 2 B A A B A B A B A B A B A SMC SMC SMC SMC SMC SMC SMC 7 A A A A A A A B B B 4 A 2 B 6 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3 4 A 2 B 2 P = 25 4 A 2 B 1 50.5 44 X Stations 12 38 27 Lead wire length (600 or 1500 mm) Manual override 11.7 D side 16.2 Indicator light 43.2 474 Base Mounted Plug Lead Unit VQ4000 Series Bottom ported